Browsing by Author "Karnaushenko, Daniil"
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- Item3D Self‐Assembled Microelectronic Devices: Concepts, Materials, Applications(Hoboke, NJ : Wiley, 2020) Karnaushenko, Daniil; Kang, Tong; Bandari, Vineeth K.; Zhu, Feng; Schmidt, Oliver G.Modern microelectronic systems and their components are essentially 3D devices that have become smaller and lighter in order to improve performance and reduce costs. To maintain this trend, novel materials and technologies are required that provide more structural freedom in 3D over conventional microelectronics, as well as easier parallel fabrication routes while maintaining compatability with existing manufacturing methods. Self‐assembly of initially planar membranes into complex 3D architectures offers a wealth of opportunities to accommodate thin‐film microelectronic functionalities in devices and systems possessing improved performance and higher integration density. Existing work in this field, with a focus on components constructed from 3D self‐assembly, is reviewed, and an outlook on their application potential in tomorrow's microelectronics world is provided.
- ItemActive Matrix Flexible Sensory Systems: Materials, Design, Fabrication, and Integration(Weinheim : Wiley-VCH Verlag GmbH & Co. KGaA, 2022) Bao, Bin; Karnaushenko, Dmitriy D.; Schmidt, Oliver G.; Song, Yanlin; Karnaushenko, DaniilA variety of modern applications including soft robotics, prosthetics, and health monitoring devices that cover electronic skins (e-skins), wearables as well as implants have been developed within the last two decades to bridge the gap between artificial and biological systems. During this development, high-density integration of various sensing modalities into flexible electronic devices becomes vitally important to improve the perception and interaction of the human bodies and robotic appliances with external environment. As a key component in flexible electronics, the flexible thin-film transistors (TFTs) have seen significant advances, allowing for building flexible active matrices. The flexible active matrices have been integrated with distributed arrays of sensing elements, enabling the detection of signals over a large area. The integration of sensors within pixels of flexible active matrices has brought the application scenarios to a higher level of sophistication with many advanced functionalities. Herein, recent progress in the active matrix flexible sensory systems is reviewed. The materials used to construct the semiconductor channels, the dielectric layers, and the flexible substrates for the active matrices are summarized. The pixel designs and fabrication strategies for the active matrix flexible sensory systems are briefly discussed. The applications of the flexible sensory systems are exemplified by reviewing pressure sensors, temperature sensors, photodetectors, magnetic sensors, and biosignal sensors. At the end, the recent development is summarized and the vision on the further advances of flexible active matrix sensory systems is provided.
- ItemBiomimetic microelectronics for regenerative neuronal cuff implants(Hoboken, NJ : Wiley, 2015) Karnaushenko, Daniil; Münzenrieder, Niko; Karnaushenko, Dmitriy D.; Koch, Britta; Meyer, Anne K.; Baunack, Stefan; Petti, Luisa; Tröster, Gerhard; Makarov, Denys; Schmidt, Oliver G.Smart biomimetics, a unique class of devices combining the mechanical adaptivity of soft actuators with the imperceptibility of microelectronics, is introduced. Due to their inherent ability to self‐assemble, biomimetic microelectronics can firmly yet gently attach to an inorganic or biological tissue enabling enclosure of, for example, nervous fibers, or guide the growth of neuronal cells during regeneration.
- ItemCompact helical antenna for smart implant applications(London : Nature Publishing Group, 2015) Karnaushenko, Dmitriy D.; Karnaushenko, Daniil; Makarov, Denys; Schmidt, Oliver G.Smart implants are envisioned to revolutionize personal health care by assessing physiological processes, for example, upon wound healing, and communicating these data to a patient or medical doctor. The compactness of the implants is crucial to minimize discomfort during and after implantation. The key challenge in realizing small-sized smart implants is high-volume cost- and time-efficient fabrication of a compact but efficient antenna, which is impedance matched to 50 Ω, as imposed by the requirements of modern electronics. Here, we propose a novel route to realize arrays of 5.5-mm-long normal mode helical antennas operating in the industry-scientific-medical radio bands at 5.8 and 2.4 GHz, relying on a self-assembly process that enables large-scale high-yield fabrication of devices. We demonstrate the transmission and receiving signals between helical antennas and the communication between an antenna and a smartphone. Furthermore, we successfully access the response of an antenna embedded in a tooth, mimicking a dental implant. With a diameter of ~0.2 mm, these antennas are readily implantable using standard medical syringes, highlighting their suitability for in-body implant applications.
- ItemDigital Electrochemistry for On-Chip Heterogeneous Material Integration(Weinheim : Wiley-VCH, 2021) Bao, Bin; Rivkin, Boris; Akbar, Farzin; Karnaushenko, Dmitriy D.; Bandari, Vineeth Kumar; Teuerle, Laura; Becker, Christian; Baunack, Stefan; Karnaushenko, Daniil; Schmidt, Oliver G.Many modern electronic applications rely on functional units arranged in an active-matrix integrated on a single chip. The active-matrix allows numerous identical device pixels to be addressed within a single system. However, next-generation electronics requires heterogeneous integration of dissimilar devices, where sensors, actuators, and display pixels sense and interact with the local environment. Heterogeneous material integration allows the reduction of size, increase of functionality, and enhancement of performance; however, it is challenging since front-end fabrication technologies in microelectronics put extremely high demands on materials, fabrication protocols, and processing environments. To overcome the obstacle in heterogeneous material integration, digital electrochemistry is explored here, which site-selectively carries out electrochemical processes to deposit and address electroactive materials within the pixel array. More specifically, an amorphous indium-gallium-zinc oxide (a-IGZO) thin-film-transistor (TFT) active-matrix is used to address pixels within the matrix and locally control electrochemical reactions for material growth and actuation. The digital electrochemistry procedure is studied in-depth by using polypyrrole (PPy) as a model material. Active-matrix-driven multicolored electrochromic patterns and actuator arrays are fabricated to demonstrate the capabilities of this approach for material integration. The approach can be extended to a broad range of materials and structures, opening up a new path for advanced heterogeneous microsystem integration.
- ItemDirect imaging of nanoscale field-driven domain wall oscillations in Landau structures(Cambridge : RSC Publ., 2022) Singh, Balram; Ravishankar, Rachappa; Otálora, Jorge A.; Soldatov, Ivan; Schäfer, Rudolf; Karnaushenko, Daniil; Neu, Volker; Schmidt, Oliver G.Linear oscillatory motion of domain walls (DWs) in the kHz and MHz regime is crucial when realizing precise magnetic field sensors such as giant magnetoimpedance devices. Numerous magnetically active defects lead to pinning of the DWs during their motion, affecting the overall behavior. Thus, the direct monitoring of the domain wall's oscillatory behavior is an important step to comprehend the underlying micromagnetic processes and to improve the magnetoresistive performance of these devices. Here, we report an imaging approach to investigate such DW dynamics with nanoscale spatial resolution employing conventional table-top microscopy techniques. Time-averaged magnetic force microscopy and Kerr imaging methods are applied to quantify the DW oscillations in Ni81Fe19 rectangular structures with Landau domain configuration and are complemented by numeric micromagnetic simulations. We study the oscillation amplitude as a function of external magnetic field strength, frequency, magnetic structure size, thickness and anisotropy and understand the excited DW behavior as a forced damped harmonic oscillator with restoring force being influenced by the geometry, thickness, and anisotropy of the Ni81Fe19 structure. This approach offers new possibilities for the analysis of DW motion at elevated frequencies and at a spatial resolution of well below 100 nm in various branches of nanomagnetism.
- ItemDirect transfer of magnetic sensor devices to elastomeric supports for stretchable electronics(Hoboken, NJ : Wiley, 2015) Melzer, Michael; Karnaushenko, Daniil; Lin, Gungun; Baunack, Stefan; Makarov, Denys; Schmidt, Oliver G.A novel fabrication method for stretchable magnetoresistive sensors is introduced, which allows the transfer of a complex microsensor systems prepared on common rigid donor substrates to prestretched elastomeric membranes in a single step. This direct transfer printing method boosts the fabrication potential of stretchable magnetoelectronics in terms of miniaturization and level of complexity, and provides strain‐invariant sensors up to 30% tensile deformation.
- ItemElectronically integrated microcatheters based on self-assembling polymer films(Washington : American Association for the Advancement of Science (A A A S), 2021) Rivkin, Boris; Becker, Christian; Singh, Balram; Aziz, Azaam; Akbar, Farzin; Egunov, Aleksandr; Karnaushenko, Dmitriy D; Naumann, Ronald; Schäfer, Rudolf; Medina-Sánchez, Mariana; Karnaushenko, Daniil; Schmidt, Oliver GExisting electronically integrated catheters rely on the manual assembly of separate components to integrate sensing and actuation capabilities. This strongly impedes their miniaturization and further integration. Here, we report an electronically integrated self-assembled microcatheter. Electronic components for sensing and actuation are embedded into the catheter wall through the self-assembly of photolithographically processed polymer thin films. With a diameter of only about 0.1 mm, the catheter integrates actuated digits for manipulation and a magnetic sensor for navigation and is capable of targeted delivery of liquids. Fundamental functionalities are demonstrated and evaluated with artificial model environments and ex vivo tissue. Using the integrated magnetic sensor, we develop a strategy for the magnetic tracking of medical tools that facilitates basic navigation with a high resolution below 0.1 mm. These highly flexible and microsized integrated catheters might expand the boundary of minimally invasive surgery and lead to new biomedical applications. Copyright © 2021 The Authors, some rights reserved.
- ItemEntirely flexible on-site conditioned magnetic sensorics(Hoboken, NJ : Wiley, 2016) Münzenrieder, Niko; Karnaushenko, Daniil; Petti, Luisa; Cantarella, Giuseppe; Vogt, Christian; Büthe, Lars; Karnaushenko, Dmitriy D.; Schmidt, Oliver G.; Makarov, Denys; Tröster, GerhardThe first entirely flexible integrated magnetic field sensor system is realized consisting of a flexible giant magnetoresistive bridge on‐site conditioned using high‐performance IGZO‐based readout electronics. The system outperforms commercial fully integrated rigid magnetic sensors by at least one order of magnitude, whereas all components stay fully functional when bend to a radius of 5 mm.
- ItemFlexible IGZO TFT Technology for Shift Register Drivers(Weinheim : Wiley-VCH, 2024) Bao, Bin; Karnaushenko, Dmitriy D.; Xu, Jiawang; Wang, Shouguo; Bandari, Vineeth Kumar; Schmidt, Oliver G.; Karnaushenko, DaniilActive sensing matrices play a pivotal role in various electronic devices, including optical and X-ray imaging arrays, electronic skins, and artificial tactile arrays, among others. These matrices function through a thin-film active switching mechanism, allowing for the scanning of rows and columns by external circuitry to read the sensory signals of individual pixels. Recently, indium–gallium-zinc oxide thin-film transistors (IGZO TFTs) have emerged as highly promising technology in the realm of flexible electronics. They enable the large-scale integration of functional circuits on flexible substrates. Shift registers are commonly employed as peripheral scanning circuits to sequentially address active-matrix arrays. To enhance system compactness and minimize external electrical connections, it is imperative to seamlessly integrate shift registers within the active matrices. However, contemporary flexible IGZO-based shift registers suffer from high operating voltages and low frequencies, which constrain their applicability in high-performance flexible sensors and displays. In response to this challenge, a breakthrough is presented in the form of low-voltage, high-frequency bootstrap shift registers implemented with flexible IGZO technology. The approach involves utilizing SU-8 buffered polyimide (PI) polymer foils as substrates. These foils boast an exceptional level of surface smoothness, significantly increasing the yield and performance of electronic components, including vias, IGZO TFTs, and capacitors used in the shift register circuitry. Additionally, HfO2/Al2O3/HfO2 sandwich structures are employed as high-k dielectric layers to reduce the operational voltage. Thanks to the innovative circuit design and optimized fabrication methods, the 16-stage shift register can operate at just 1.8 V with a frequency of 15 kHz. This breakthrough promises to have a profound impact on a wide range of applications for driving flexible active-matrix electronic systems.
- ItemHigh-performance magnetic sensorics for printable and flexible electronics(Hoboken, NJ : Wiley, 2014) Karnaushenko, Daniil; Makarov, Denys; Stöber, Max; Karnaushenko, Dmitriy D.; Baunack, Stefan; Schmidt, Oliver G.High‐performance giant magnetoresistive (GMR) sensorics are realized, which are printed at predefined locations on flexible circuitry. Remarkably, the printed magnetosensors remain fully operational over the complete consumer temperature range and reveal a giant magnetoresistance up to 37% and a sensitivity of 0.93 T−1 at 130 mT. With these specifications, printed magnetoelectronics can be controlled using flexible active electronics for the realization of smart packaging and energy‐efficient switches.
- ItemImpedimetric Microfluidic Sensor-in-a-Tube for Label-Free Immune Cell Analysis(Weinheim : Wiley-VCH, 2021) Egunov, Aleksandr I.; Dou, Zehua; Karnaushenko, Dmitriy D.; Hebenstreit, Franziska; Kretschmann, Nicole; Akgün, Katja; Ziemssen, Tjalf; Karnaushenko, Daniil; Medina-Sánchez, Mariana; Schmidt, Oliver G.Analytical platforms based on impedance spectroscopy are promising for non-invasive and label-free analysis of single cells as well as of their extracellular matrix, being essential to understand cell function in the presence of certain diseases. Here, an innovative rolled-up impedimetric microfulidic sensor, called sensor-in-a-tube, is introduced for the simultaneous analysis of single human monocytes CD14+ and their extracellular medium upon liposaccharides (LPS)-mediated activation. In particular, rolled-up platinum microelectrodes are integrated within for the static and dynamic (in-flow) detection of cells and their surrounding medium (containing expressed cytokines) over an excitation frequency range from 102 to 5 × 106 Hz. The correspondence between cell activation stages and the electrical properties of the cell surrounding medium have been detected by electrical impedance spectroscopy in dynamic mode without employing electrode surface functionalization or labeling. The designed sensor-in-a-tube platform is shown as a sensitive and reliable tool for precise single cell analysis toward immune-deficient diseases diagnosis.
- ItemImperceptible magnetoelectronics(London : Nature Publishing Group, 2015) Melzer, Michael; Kaltenbrunner, Martin; Makarov, Denys; Karnaushenko, Dmitriy; Karnaushenko, Daniil; Sekitani, Tsuyoshi; Someya, Takao; Schmidt, Oliver G.Future electronic skin aims to mimic nature’s original both in functionality and appearance. Although some of the multifaceted properties of human skin may remain exclusive to the biological system, electronics opens a unique path that leads beyond imitation and could equip us with unfamiliar senses. Here we demonstrate giant magnetoresistive sensor foils with high sensitivity, unmatched flexibility and mechanical endurance. They are <2 μm thick, extremely flexible (bending radii <3 μm), lightweight (≈3 g m−2) and wearable as imperceptible magneto-sensitive skin that enables proximity detection, navigation and touchless control. On elastomeric supports, they can be stretched uniaxially or biaxially, reaching strains of >270% and endure over 1,000 cycles without fatigue. These ultrathin magnetic field sensors readily conform to ubiquitous objects including human skin and offer a new sense for soft robotics, safety and healthcare monitoring, consumer electronics and electronic skin devices.
- ItemImperceptible Supercapacitors with High Area-Specific Capacitance(Weinheim : Wiley-VCH, 2021) Ge, Jin; Zhu, Minshen; Eisner, Eric; Yin, Yin; Dong, Haiyun; Karnaushenko, Dmitriy D.; Karnaushenko, Daniil; Zhu, Feng; Ma, Libo; Schmidt, Oliver G.Imperceptible electronics will make next-generation healthcare and biomedical systems thinner, lighter, and more flexible. While other components are thoroughly investigated, imperceptible energy storage devices lag behind because the decrease of thickness impairs the area-specific energy density. Imperceptible supercapacitors with high area-specific capacitance based on reduced graphene oxide/polyaniline (RGO/PANI) composite electrodes and polyvinyl alcohol (PVA)/H2SO4 gel electrolyte are reported. Two strategies to realize a supercapacitor with a total device thickness of 5 µm—including substrate, electrode, and electrolyte—and an area-specific capacitance of 36 mF cm−2 simultaneously are implemented. First, the void volume of the RGO/PANI electrodes through mechanical compression is reduced, which decreases the thickness by 83% while retaining 89% of the capacitance. Second, the PVA-to-H2SO4 mass ratio is decreased to 1:4.5, which improves the ion conductivity by 5000% compared to the commonly used PVA/H2SO4 gel. Both advantages enable a 2 µm-thick gel electrolyte for planar interdigital supercapacitors. The impressive electromechanical stability of the imperceptible supercapacitors by wrinkling the substrate to produce folds with radii of 6 µm or less is demonstrated. The supercapacitors will be meaningful energy storage modules for future self-powered imperceptible electronics.
- ItemMechanical Characterization of Compact Rolled-up Microtubes Using In Situ Scanning Electron Microscopy Nanoindentation and Finite Element Analysis(Weinheim : Wiley-VCH, 2021) Moradi, Somayeh; Jöhrmann, Nathanael; Karnaushenko, Dmitriy D.; Zschenderlein, Uwe; Karnaushenko, Daniil; Wunderle, Bernhard; Schmidt, Oliver G.Self-assembled Swiss-roll microstructures (SRMs) are widely explored to build up microelectronic devices such as capacitors, transistors, or inductors as well as sensors and lab-in-a-tube systems. These devices often need to be transferred to a special position on a microchip or printed circuit board for the final application. Such a device transfer is typically conducted by a pick-and-place process exerting enormous mechanical loads onto the 3D components that may cause catastrophic failure of the device. Herein, the mechanical deformation behavior of SRMs using experiments and simulations is investigated. SRMs using in situ scanning electron microscopy (SEM) combined with nanoindentation are characterized. This allows us to mimic and characterize mechanical loads as they occur in a pick-and-place process. The deformation response of SRMs depends on three geometrical factors, i.e., the number of windings, compactness of consecutive windings, and inner diameter of the microtube. Nonlinear finite element analysis (FEA) showing good agreement with experiments is performed. It is believed that the insights into the mechanical loading of 3D self-assembled architectures will lead to novel techniques suitable for a new generation of pick-and-place machines operating at the microscale. © 2021 The Authors. Advanced Engineering Materials published by Wiley-VCH GmbH
- ItemMonitoring microbial metabolites using an inductively coupled resonance circuit(London : Nature Publishing Group, 2015) Karnaushenko, Daniil; Baraban, Larysa; Ye, Dan; Uguz, Ilke; Mendes, Rafael G.; Rümmeli, Mark H.; de Visser, J. Arjan G.M.; Schmidt, Oliver G.; Cuniberti, Gianaurelio; Makarov, DenysWe present a new approach to monitor microbial population dynamics in emulsion droplets via changes in metabolite composition, using an inductively coupled LC resonance circuit. The signal measured by such resonance detector provides information on the magnetic field interaction with the bacterial culture, which is complementary to the information accessible by other detection means, based on electric field interaction, i.e. capacitive or resistive, as well as optical techniques. Several charge-related factors, including pH and ammonia concentrations, were identified as possible contributors to the characteristic of resonance detector profile. The setup enables probing the ionic byproducts of microbial metabolic activity at later stages of cell growth, where conventional optical detection methods have no discriminating power.
- ItemNano-biosupercapacitors enable autarkic sensor operation in blood([London] : Nature Publishing Group UK, 2021) Lee, Yeji; Bandari, Vineeth Kumar; Li, Zhe; Medina-Sánchez, Mariana; Maitz, Manfred F.; Karnaushenko, Daniil; Tsurkan, Mikhail V; Karnaushenko, Dmitriy D.; Schmidt, Oliver G.Today’s smallest energy storage devices for in-vivo applications are larger than 3 mm3 and lack the ability to continuously drive the complex functions of smart dust electronic and microrobotic systems. Here, we create a tubular biosupercapacitor occupying a mere volume of 1/1000 mm3 (=1 nanoliter), yet delivering up to 1.6 V in blood. The tubular geometry of this nano-biosupercapacitor provides efficient self-protection against external forces from pulsating blood or muscle contraction. Redox enzymes and living cells, naturally present in blood boost the performance of the device by 40% and help to solve the self-discharging problem persistently encountered by miniaturized supercapacitors. At full capacity, the nano-biosupercapacitors drive a complex integrated sensor system to measure the pH-value in blood. This demonstration opens up opportunities for next generation intravascular implants and microrobotic systems operating in hard-to-reach small spaces deep inside the human body.
- ItemA new dimension for magnetosensitive e-skins: active matrix integrated micro-origami sensor arrays([London] : Nature Publishing Group UK, 2022) Becker, Christian; Bao, Bin; Karnaushenko, Dmitriy D.; Bandari, Vineeth Kumar; Rivkin, Boris; Li, Zhe; Faghih, Maryam; Karnaushenko, Daniil; Schmidt, Oliver G.Magnetic sensors are widely used in our daily life for assessing the position and orientation of objects. Recently, the magnetic sensing modality has been introduced to electronic skins (e-skins), enabling remote perception of moving objects. However, the integration density of magnetic sensors is limited and the vector properties of the magnetic field cannot be fully explored since the sensors can only perceive field components in one or two dimensions. Here, we report an approach to fabricate high-density integrated active matrix magnetic sensor with three-dimensional (3D) magnetic vector field sensing capability. The 3D magnetic sensor is composed of an array of self-assembled micro-origami cubic architectures with biased anisotropic magnetoresistance (AMR) sensors manufactured in a wafer-scale process. Integrating the 3D magnetic sensors into an e-skin with embedded magnetic hairs enables real-time multidirectional tactile perception. We demonstrate a versatile approach for the fabrication of active matrix integrated 3D sensor arrays using micro-origami and pave the way for new electronic devices relying on the autonomous rearrangement of functional elements in space.
- ItemA Patternable and In Situ Formed Polymeric Zinc Blanket for a Reversible Zinc Anode in a Skin-Mountable Microbattery(Weinheim : Wiley-VCH, 2021) Zhu, Minshen; Hu, Junping; Lu, Qiongqiong; Dong, Haiyun; Karnaushenko, Dmitriy D.; Becker, Christian; Karnaushenko, Daniil; Li, Yang; Tang, Hongmei; Qu, Zhe; Ge, Jin; Schmidt, Oliver G.Owing to their high safety and reversibility, aqueous microbatteries using zinc anodes and an acid electrolyte have emerged as promising candidates for wearable electronics. However, a critical limitation that prevents implementing zinc chemistry at the microscale lies in its spontaneous corrosion in an acidic electrolyte that causes a capacity loss of 40% after a ten-hour rest. Widespread anti-corrosion techniques, such as polymer coating, often retard the kinetics of zinc plating/stripping and lack spatial control at the microscale. Here, a polyimide coating that resolves this dilemma is reported. The coating prevents corrosion and hence reduces the capacity loss of a standby microbattery to 10%. The coordination of carbonyl oxygen in the polyimide with zinc ions builds up over cycling, creating a zinc blanket that minimizes the concentration gradient through the electrode/electrolyte interface and thus allows for fast kinetics and low plating/stripping overpotential. The polyimide's patternable feature energizes microbatteries in both aqueous and hydrogel electrolytes, delivering a supercapacitor-level rate performance and 400 stable cycles in the hydrogel electrolyte. Moreover, the microbattery is able to be attached to human skin and offers strong resistance to deformations, splashing, and external shock. The skin-mountable microbattery demonstrates an excellent combination of anti-corrosion, reversibility, and durability in wearables. © 2021 The Authors. Advanced Materials published by Wiley-VCH GmbH
- ItemPrintable magnetoelectronics(Hoboken, NJ : Wiley, 2013) Makarov, Denys; Karnaushenko, Daniil; Schmidt, Oliver G.The field of printable electronics is well developed. A large variety of electronic components assembled as printable optoelectronic devices and communication modules are already available. However, the element responding to a magnetic field, which is highly demanded for the concept of printable electronics has only been realized very recently. A printable magnetic sensing device has been one of the remaining missing building blocks crucial to realize the concept of entirely printable electronics. Here, we position the novel topic of printable magnetic sensorics in a family of printable electronics and highlight possible application directions of this technology.