Orientation‐dependent nanostructuring of titanium surfaces by low‐energy ion beam erosion

Abstract

Regular nanoscopic ripple and dot patterns are fabricated on poly-crystalline titanium samples by irradiation with 1.5 keV argon ions at normal incidence. The morphology of the nanostructures is investigated by scanning electron microscopy and scanning force microscopy. The ripple structures exhibit a saw-tooth cross-section profile. Electron backscatter diffraction experiments are performed to analyze the local grain structure. The study suggests a distinct correlation of the nanostructure morphology to the crystallographic orientation of the titanium surface.