Schlussbericht zum BMBF-Vorhaben: Herstellungstechnologien und -Prozesse für hoch performante 2nm-Elektronik, im Rahmen des ECSEL Projekts: Integration of processes and moDules for the 2nm node meeting Power Performance Area and Cost requirements (ID2PPAC)
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Hannover : Technische Informationsbibliothek
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Creative Commons Attribution-NonDerivs 3.0 Germany