On the interaction of a microwave excited oxygen plasma with a jet of precursor material for deposition applications

dc.bibliographicCitation.firstPage243
dc.bibliographicCitation.issue3
dc.bibliographicCitation.journalTitlePlasma physics and technologyeng
dc.bibliographicCitation.lastPage246
dc.bibliographicCitation.volume6
dc.contributor.authorMethling, R.
dc.contributor.authorHempel, F.
dc.contributor.authorBaeva, M.
dc.contributor.authorTrautvetter, T.
dc.contributor.authorBaierl, H.
dc.contributor.authorFoest, R.
dc.date.accessioned2023-05-25T10:24:57Z
dc.date.available2023-05-25T10:24:57Z
dc.date.issued2019
dc.description.abstractA plasma source based on a microwave discharge at atmospheric pressure is used to produce an oxygen plasma torch. A liquid precursor material is evaporated and injected into the torch through a nozzle, causing oxidization and deposition of silica at a nearby quartz substrate. The temperature generated inside the plasma source and in the plume, in the region of treatment, and at the substrate surface are key parameters, which are needed for process description and optimization of plasma-chemical reactions. Optical emission spectroscopy and thermography were applied to observe and characterize the jet behavior and composition. The experimental results are compared with self-consistent modeling.eng
dc.description.versionpublishedVersioneng
dc.identifier.urihttps://oa.tib.eu/renate/handle/123456789/12196
dc.identifier.urihttp://dx.doi.org/10.34657/11228
dc.language.isoeng
dc.publisherPraha : Czech Technical University in Prague, Faculty of Electrical Engineering, Department of Physics
dc.relation.doihttps://doi.org/10.14311/ppt.2019.3.243
dc.relation.essn2336-2634
dc.relation.issn2336-2626
dc.rights.licenseCC BY 3.0 Unported
dc.rights.urihttps://creativecommons.org/licenses/by/3.0/
dc.subject.ddc530
dc.subject.gndKonferenzschriftger
dc.subject.otherMicrowave plasmaeng
dc.subject.otherOptical emission spectroscopyeng
dc.subject.otherPlasma jeteng
dc.subject.otherThermographyeng
dc.titleOn the interaction of a microwave excited oxygen plasma with a jet of precursor material for deposition applicationseng
dc.typeArticleeng
dc.typeTexteng
dcterms.event23rd Symposium on Physics of Switching Arc 2019, FSO 2019, 9-13 September 2019, Nove Mesto na Morave, Czech Republic
tib.accessRightsopenAccess
wgl.contributorINP
wgl.subjectPhysikger
wgl.typeZeitschriftenartikelger
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