Parametric computational study of sheaths in multicomponent Ar/O2 plasma

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dc.bibliographicCitation.articleNumber012008
dc.bibliographicCitation.firstPage012008
dc.bibliographicCitation.journalTitleJournal of Physics: Conference Series
dc.bibliographicCitation.volume982
dc.contributor.authorHromadka, J.
dc.contributor.authorIbehej, T.
dc.contributor.authorHrach, R.
dc.date.accessioned2025-02-27T12:55:45Z
dc.date.available2025-02-27T12:55:45Z
dc.date.issued2018
dc.description.abstractOur study is devoted to sheath structures emerging in Ar/O2 plasma. By means of two dimensional PIC/MCC computer model two configurations were investigated-sheath structure in the vicinity of a cylindrical Langmuir probe for two different biases and changes of the sheath structure when a cylindrical probe passes into a semi-planar probe. It was shown that O+ ions play important role in shielding out negative bias of a solid immersed in Ar/O2 plasma and edge effects of a semi-planar probe on its sheath structure were evaluated.eng
dc.description.versionpublishedVersioneng
dc.identifier.urihttps://oa.tib.eu/renate/handle/123456789/18645
dc.identifier.urihttps://doi.org/10.34657/17664
dc.language.isoeng
dc.publisherBristol : IOP Publ.
dc.relation.doihttps://doi.org/10.1088/1742-6596/982/1/012008
dc.relation.essn1742-6596
dc.relation.issn1742-6588
dc.rights.licenseCC BY 3.0 Unported
dc.rights.urihttps://creativecommons.org/licenses/by/3.0
dc.subject.ddc530
dc.subject.gndKonferenzschriftger
dc.subject.otherPhysicseng
dc.subject.otherComputational studieseng
dc.subject.otherComputer modelingeng
dc.subject.otherCylindrical Langmuir Probeeng
dc.subject.otherEdge effecteng
dc.subject.otherMulticomponentseng
dc.subject.otherNegative biaseng
dc.subject.otherSheath structureseng
dc.subject.otherProbeseng
dc.titleParametric computational study of sheaths in multicomponent Ar/O2 plasmaeng
dc.typeArticle
dc.typeText
dcterms.event7th International Workshop and Summer School on Plasma Physics, IWSSPP 2016
dcterms.event.date26 June 2016 through 2 July 2016
dcterms.event.placeKiten, Bulgaria
tib.accessRightsopenAccess
wgl.contributorINP
wgl.subjectPhysikger
wgl.typeZeitschriftenartikelger
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