On-Chip Micro Temperature Controllers Based on Freestanding Thermoelectric Nano Films for Low-Power Electronics

CC BY 4.0 UnportedJin, QunGuo, TianxiaoPérez, NicolásYang, NianjunJiang, XinNielsch, KorneliusReith, Heiko2024-05-072024-05-072024https://oa.tib.eu/renate/handle/123456789/14569https://doi.org/10.34657/13600Dense and flat freestanding Bi2Te3-based thermoelectric nano films were successfully fabricated by sputtering technology using a newly developed nano graphene oxide membrane as a substrate. On-chip micro temperature controllers were integrated using conventional micro-electromechanical system technology, to achieve energy-efficient temperature control for low-power electronics. The tunable equivalent thermal resistance enables an ultrahigh temperature control capability of 100 K mW−1 and an ultra-fast cooling rate exceeding 2000 K s−1, as well as excellent reliability of up to 1 million cycles.enghttps://creativecommons.org/licenses/by/4.0050Freestanding thermoelectric nano filmsLow-power electronicsOn-chip micro temperature controllerTemperature controlTemperature-sensitive componentsOn-Chip Micro Temperature Controllers Based on Freestanding Thermoelectric Nano Films for Low-Power ElectronicsArticle