CC BY-NC-SA 4.0 UnportedKersten, H.Wiese, R.Thieme, G.Fröhlich, M.Kopitov, A.Bojic, D.Scholze, F.Neumann, H.Quaas, M.Wulff, H.Hippler, R.2025-03-042025-03-042003https://oa.tib.eu/renate/handle/123456789/18749https://doi.org/10.34657/17768Low-pressure plasmas offer a unique possibility of confinement, control and fine tailoring of particle properties. Hence, dusty plasmas have grown into a vast field and new applications of plasma-processed dust particles are emerging. There is demand for particles with special properties and for particle-seeded composite materials. For example, the stability of luminophore particles could be improved by coating with protective Al2O3 films which are deposited by a PECVD process using a metal-organic precursor gas. Alternatively, the interaction between plasma and injected micro-disperse powder particles can also be used as a diagnostic tool for the study of plasma surface processes. Two examples will be provided: the interaction of micro-sized (SiO2) grains confined in a radiofrequency plasma with an external ion beam as well as the effect of a dc-magnetron discharge on confined particles during deposition have been investigated.enghttps://creativecommons.org/licenses/by-nc-sa/3.0/530Low-pressure plasmaPECVD processArticle