CC BY-NC 4.0 UnportedBecker, C.Karnaushenko, D.Kang, T.Karnaushenko, D.D.Faghih, M.Mirhajivarzaneh, A.Schmidt, O.G.2020-07-182020-07-182019https://doi.org/10.34657/3641https://oa.tib.eu/renate/handle/123456789/5012Novel robotic, bioelectronic, and diagnostic systems require a variety of compact and high-performance sensors. Among them, compact three-dimensional (3D) vector angular encoders are required to determine spatial position and orientation in a 3D environment. However, fabrication of 3D vector sensors is a challenging task associated with time-consuming and expensive, sequential processing needed for the orientation of individual sensor elements in 3D space. In this work, we demonstrate the potential of 3D self-assembly to simultaneously reorient numerous giant magnetoresistive (GMR) spin valve sensors for smart fabrication of 3D magnetic angular encoders. During the self-assembly process, the GMR sensors are brought into their desired orthogonal positions within the three Cartesian planes in a simultaneous process that yields monolithic high-performance devices. We fabricated vector angular encoders with equivalent angular accuracy in all directions of 0.14°, as well as low noise and low power consumption during high-speed operation at frequencies up to 1 kHz.enghttps://creativecommons.org/licenses/by-nc/4.0/530Giant magnetoresistanceSelf assemblyVector spacesVectorsGiant magnetoresistiveHigh performance devicesHigh performance sensorsLow-power consumptionMagnetic field vectorsSelf assembly processSequential processingThreedimensional (3-d)Signal encodingArticle