CC BY 4.0 UnportedDeinhart, VictorKern, Lisa-MarieKirchhof, Jan N.Juergensen, SabrinaSturm, JorisKrauss, EnnoFeichtner, ThorstenKovalchuk, SviatoslavSchneider, MichaelEngel, DieterPfau, BastianHecht, BertBolotin, Kirill I.Reich, StephanieHöflich, Katja2022-03-162022-03-162021https://oa.tib.eu/renate/handle/123456789/8248https://doi.org/10.34657/7286Focused beams of helium ions are a powerful tool for high-fidelity machining with spatial precision below 5 nm. Achieving such a high patterning precision over large areas and for different materials in a reproducible manner, however, is not trivial. Here, we introduce the Python toolbox FIB-o-mat for automated pattern creation and optimization, providing full flexibility to accomplish demanding patterning tasks. FIB-o-mat offers high-level pattern creation, enabling high-fidelity large-area patterning and systematic variations in geometry and raster settings. It also offers low-level beam path creation, providing full control over the beam movement and including sophisticated optimization tools. Three applications showcasing the potential of He ion beam nanofabrication for two-dimensional material systems and devices using FIB-o-mat are presented.enghttps://creativecommons.org/licenses/by/4.0/620540automated patterningfocused He ion beamgraphenemagnetic multilayersmechanical resonatorpattern generationplasmonic antennastwo-dimensional materialsArticle