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- ItemReactive ion beam figuring of optical aluminium surfaces(Bristol : IOP Publ., 2017) Bauer, Jens; Frost, Frank; Arnold, ThomasUltra-smooth and arbitrarily shaped reflective optics are necessary for further progress in EUV/XUV lithography, x-ray and synchrotron technology. As one of the most important technological mirror optic materials, aluminium behaves in a rather difficult way in ultra-precision machining with such standard techniques as diamond-turning and subsequent ion beam figuring (IBF). In particular, in the latter, a strong surface roughening is obtained. Hence, up to now it has not been possible to attain the surface qualities required for UV or just visible spectral range applications. To overcome the limitations mainly caused by the aluminium alloy structural and compositional conditions, a reactive ion beam machining process using oxygen process gas is evaluated. To clarify the principle differences in the effect of oxygen gas contrary to oxygen ions on aluminium surface machining, we firstly focus on chemical-assisted ion beam etching (CAIBE) and reactive ion beam etching (RIBE) experiments in a phenomenological manner. Then, the optimum process route will be explored within a more quantitative analysis applying the concept of power spectral density (PSD) for a sophisticated treatment of the surface topography. Eventually, the surface composition is examined by means of dynamic secondary ion mass spectrometry (SIMS) suggesting a characteristic model scheme for the chemical modification of the aluminium surface during oxygen ion beam machining. Monte Carlo simulations were applied to achieve a more detailed process conception.
- ItemDevelopment of a model for ultra-precise surface machining of N-BK7® using microwave-driven reactive plasma jet machining(Hoboken, NJ : Wiley Interscience, 2019) Kazemi, Faezeh; Boehm, Georg; Arnold, ThomasIn this paper, extensive studies are conducted as key to overcoming several challenging limitations in applying fluorine-based reactive plasma jet machining (PJM) to surface machining of N-BK7®, particularly regarding the manufacture of freeform optical elements. The chemical composition and lateral distributions of the residual layer are evaluated by X-ray photoelectron spectroscopy and scanning electron microscopy/energy-dispersive X-ray spectroscopy analysis aiming at clarifying the exact chemical kinetics between plasma generated active particles and the N-BK7 surface atoms. Subsequently, a model is developed by performing static etchings to consider the time-varying nonlinearity of the material removal rate and estimate the local etching rate function. Finally, the derived model is extended into the dynamic machining process, and the outcomes are compared with the experimental results.
- ItemImproved ion beam tools for ultraprecision figure correction of curved aluminum mirror surfaces([Bellingham, Wash.] : SPIE, 2018) Bauer, Jens; Ulitschka, Melanie; Pietag, Fred; Arnold, ThomasAluminum mirrors offer great potential for satisfying the increasing demand in high-performance optical components for visible and ultraviolet applications. Ion beam figuring is an established finishing technology and in particular a promising technique for direct aluminum figure error correction. For the machining of strongly curved or arbitrarily shaped surfaces as well as the correction of low-to-mid spatial frequency figure errors, the usage of a high-performance ion beam source with low tool width is mandatory. For that reason, two different concepts of ion beam generation with high ion current density and narrow beam width are discussed. (1) A concave ion beam extraction grid system is used for apertureless constriction of ion beams in the low millimeter range. An oxygen ion beam with a full-width at half-maximum (FWHM) of 4.0 mm with an ion current density of 29.8 mA / cm2 was achieved. (2) For even smaller ion beams, a conic aperture design with a submillimeter-sized exit opening was tested. A nitrogen ion beam with an FWHM down to 0.62 mm with an ion current density of 4.6 mA / cm2 was obtained. In situ ion current density mapping is performed by scanning Faraday probe measurements. Special interest is set on the data evaluation for submillimeter ion beam analysis.
- ItemFinishing of metal optics by ion beam technologies(Bellingham, Wash. : SPIE, 2019) Bauer, Jens; Frost, Frank; Lehmann, Antje; Ulitschka, Melanie; Li, Yaguo; Arnold, ThomasUltraprecise mirror devices show considerable potential with view to applications in the visible and the ultraviolet spectral ranges. Aluminum alloys gather good mechanical and excellent optical properties and thus they emerge as important mirror construction materials. However, ultraprecision machining and polishing of optical aluminum surfaces are challenging, which originates from the high chemical reactivity and the heterogeneous matrix structure. Recently, several ion beam-based techniques have been developed to qualify aluminum mirrors for short-wavelength applications. We give an overview of the state-of-the-art ion beamprocessing techniques for figure error correction and planarization, either by direct aluminum machining or with the aid of polymer or inorganic, amorphous surface films. © The Authors.
- ItemSide effects by oral application of atmospheric pressure plasma on the mucosa in mice(San Francisco, California, US : PLOS, 2019) Jablonowski, Lukasz; Kocher, Thomas; Schindler, Axel; Müller, Karolina; Dombrowski, Frank; von Woedtke, Thomas; Arnold, Thomas; Lehmann, Antje; Rupf, Stefan; Evert, Matthias; Evert, KatjaCold atmospheric pressure plasma (CAP) has been investigated with promising results for peri-implant diseases treatment. However, prior to in-vivo applications of CAP sources in humans, short-term harmful mucosal damage or other unwanted side effects have to be reviewed. 180 male mice (B6C3F1) were divided into twelve treatment groups (n = 15). The right buccal cheek mucosa was treated with CAP. The first and second group each received continuous 10 sec irradiation with 2 different plasma sources (kINPen09, PS-MWM). The third group was treated with the kINPen09 for one minute. Control groups were treated with a corresponding dose of ultraviolet light for 8 seconds or 48 seconds and the other one was left untreated. The animals were weighed before and after treatment. The animals were sacrificed one day or one week after exposure. Stained tissue samples were histologically examined for tissue damage independently by two experienced pathologists. One day after CAP treatment histological analysis showed focal mucosal erosion with superficial ulceration and necrosis accompanied by a mild inflammatory reaction. One week after CAP treatment, the mucosal defects were completely re-epithelialized, associated with remnants of granulation tissue in the stroma irrespective of treatment duration. Furthermore, no cytological atypia was found and no severe weight loss occurred. The control groups did not show any alterations at all. CAP treatment led to a superficial mucosal damage that healed within few days. Nonetheless, further long-term experiments are necessary to exclude undesirable side effects after longer observation time. Particularly, potential carcinogenic effects must be ruled out prior to the application of CAP treatment in daily dental practice.
- ItemIon beam figuring machine for ultra-precision silicon spheres correction(Amsterdam [u.a.] : Elsevier Science, 2015) Arnold, Thomas; Pietag, FredIn the framework of the Avogadro project, isotopically enriched 28Si spheres had been manufactured as artifacts for the assessment of various physical quantities including the sphere volume which finally leads to a very accurate determination of the Avogadro constant NA. The Avogadro constant is an important input datum for the redefinition of the unit of mass, the kilogram, on the basis of fundamental physical constants. During the recent measurement campaign, it has turned out that one of the main contributions to the overall uncertainty of NA is the sphericity error and consequently the interferometric volume measurement. Since chemical–mechanical polishing has reached its limits with respect to form accuracy due to the sensitivity of material removal rate to crystal orientation, it has been proposed to use ion beam figuring for further reduction of sphericity error from currently 50 nm PV to values <10 nm PV. In this paper, a new concept and realization of a multi-axis ion beam figuring machine dedicated for deterministic correction of silicon spheres is presented. Aspects of long term tool stability and alignment procedures in order to relate the ion beam footprint to the sphere surface are covered. Furthermore, a process dwell time calculation and tool path generation method dedicated for spheres manufacturing will be presented and discussed.
- ItemUltrapräzisionsbearbeitung mit atomaren Teilchenstrahlen : Schlussbericht zum InnoProfile-Vorhaben ; Berichtszeitraum: 01.10.2007 - 31.12.2012(Hannover : Technische Informationsbibliothek (TIB), 2013) Arnold, Thomas; Böhm, Georg; Paetzelt, Hendrik; Eichentopf, Inga-Maria; Luteran, Johannes; Volkmer, Manuela; Mießler, André[no abstract available]