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search.filters.applied.f.access: openAccess × End date: 2019 × Start date: 2012 × Has files: Yes × Subject: Fused silica × Subject: Konferenzschrift × WGL Institute: IOM ×

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    Laser-Induced front Side Etching: An Easy and Fast Method for Sub-μm Structuring of Dielectrics
    (Amsterdam [u.a.] : Elsevier, 2012) Lorenz, P.; Ehrhardt, M.; Zimmer, K.
    Laser-induced front side etching (LIFE) is a method for the nanometer-precision structuring of dielectrics, e.g. fused silica, using thin metallic as well as organic absorber layer attached to the laser-irradiated front side of the sample. As laser source an excimer laser with a wavelength of 248 nm and an pulse duration of 25 ns was used. For sub-μm patterning a phase mask illuminated by the top hat laser beam was projected by a Schwarzschild objective. The LIFE process allows the fabrication of well-defined and smooth surface structures with sub-μm lateral etching regions (Δx < 350 nm) and vertical etching depths from 1 nm to sub-mm.
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    From statistic to deterministic nanostructures in fused silica induced by nanosecond laser radiation
    (Amsterdam [u.a.] : Elsevier, 2018) Lorenz, Pierre; Klöppel, Michael; Zagoranskiy, Igor; Zimmer, Klaus
    The production of structures by laser machining below the diffraction limit is still a challenge. However, self-organization processes can be useful. The laser-induced self-organized modification of the shape of photolithographic produced chromium structures on fused silica as well as the structuring of the fused silica surface by nanosecond UV laser radiation was studied, respectively. Low fluence single pulse laser irradiation (□ > 300 mJ/cm2) cause the formation from chromium squares to droplets due to the mass transport in the molten chromium film. This process is governed by the instability of the molten metal due to the surface tension driven liquid phase mass transport. For a chromium pattern size similar to the instability length two specific droplet distributions were found which are single droplets with a determined position near the centre of the original pattern or random distributed smaller droplets arranged circularly. Each of the metal patterns can be transferred into the fused silica by a multi-pulse irradiation. The experimental results can be simulated well for low fluences by sequential solving the heat and Navier-Stokes equation.