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    Improving the electrical and structural stability of highly piezoresistive nickel–carbon sensor thin films
    (Göttingen : Copernicus Publ., 2022) Schultes, Günter; Cerino, Mario; Lellig, Angela; Koch, Marcus
    The family of sputter deposited granular metal-based carbon-containing sensor films is known for their high sensitivity transforming force-dependent strain into electrical resistance change. Among them nickel–carbon thin films possess a gauge factor of up to 30, compared to only 2 for traditional sensor films of metal alloys. This high sensitivity is based on disordered interparticle tunneling through barriers of graphite-like carbon walls between metal–carbon particles of columnar shape. Force and pressure sensors would benefit a lot from the elevated piezoresistivity. A disadvantage, however, is a disturbing temporal creep and drift of the resistance under load and temperature. This contribution shows how to stabilize such sensor films. A significant stabilization is achieved by partially replacing nickel with chromium, albeit at the expense of sensitivity. The more chromium used in these NixCr1−x-C layers, the higher the optimum annealing temperature can be selected and the better the electrical stabilization. A good compromise while maintaining sensitivities well above the standard of 2 is identified for films with x=0.5 to 0.9, stabilized by optimized temperature treatments. The stabilizing effect of chromium is revealed by transmission electron microscopy with elemental analysis. The post-annealing drives segregation processes in the layer material. While the interior of the layer is depleted of chromium and carbon, boundary layers are formed. Chromium is enriched near the surface boundary, oxidized in air and forms chromium-rich oxide sub-layers, which are chemically very stable and protect against further reactions and corrosion. As a result, creep and drift errors are greatly reduced, so that the optimized sensor coatings are now suitable for widespread use.
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    Granular metal-carbon nanocomposites as piezoresistive sensor films - Part 1: Experimental results and morphology
    (Göttingen : Copernicus Publ., 2018) Schultes, Günter; Schmid-Engel, Hanna; Schwebke, Silvan; Werner, Ulf
    We have produced granular films based on carbon and different transition metals by means of plasma deposition processes. Some of the films possess an increased strain sensitivity compared to metallic films. They respond to strain almost linearly with gauge factors of up to 30 if strained longitudinally, while in the transverse direction about half of the effect is still measured. In addition, the film's thermal coefficient of resistance is adjustable by the metal concentration. The influence of metal concentration was investigated for the elements Ni, Pd, Fe, Pt, W, and Cr, while the elements Co, Au, Ag, Al, Ti, and Cu were studied briefly. Only Ni and Pd have a pronounced strain sensitivity at 55- €±- €5- €at.- €% (atomic percent) of metal, among which Ni–C is far more stable. Two phases are identified by transmission electron microscopy and X-ray diffraction: metal-containing nanocolumns densely packed in a surrounding carbon phase. We differentiate three groups of metals, due to their respective affinity to carbon. It turns out that only nickel has the capability to bond and form a stable and closed encapsulation of GLC around each nanoparticle. In this structure, the electron transport is in part accomplished by tunneling processes across the basal planes of the graphitic encapsulation. Hence, we hold these tunneling processes responsible for the increased gauge factors of Ni–C composites. The other elements are unable to form graphitic encapsulations and thus do not exhibit elevated gauge factors.
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    Granular metal-carbon nanocomposites as piezoresistive sensor films-Part 2: Modeling longitudinal and transverse strain sensitivity
    (Göttingen : Copernicus Publ., 2018) Schwebke, Silvan; Werner, Ulf; Schultes, Günter
    Granular and columnar nickel-carbon composites may exhibit large strain sensitivity, which makes them an interesting sensor material. Based on experimental results and morphological characterization of the material, we develop a model of the electron transport in the film and use it to explain its piezoresistive effect. First we describe a model for the electron transport from particle to particle. The model is then applied in Monte Carlo simulations of the resistance and strain properties of the disordered films that give a first explanation of film properties. The simulations give insights into the origin of the transverse sensitivity and show the influence of various parameters such as particle separation and geometric disorder. An important influence towards larger strain sensitivity is local strain enhancement due to different elastic moduli of metal particles and carbon matrix.