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- ItemHigh-temperature high-sensitivity AlN-on-SOI Lamb wave resonant strain sensor(New York, NY : American Inst. of Physics, 2018) Dou, Shaoxu; Qi, Mengke; Chen, Cong; Zhou, Hong; Wang, Yong; Shang, Zhengguo; Yang, Jing; Wang, Dengpan; Mu, XiaojingA piezoelectric AlN-on-SOI structured MEMS Lamb wave resonator (LWR) is presented for high-temperature strain measurement. The LWR has a composite membrane of a 1 μm thick AlN film and a 30 μm thick device silicon layer. The excited acoustic waves include Rayleigh wave and Lamb waves. A tensile strain sensor has been prepared with one LWR mounted on a uniaxial tensile plate, and its temperature characteristics from 15.4°C to 250°C and tensile strain behaviors from 0 μϵ to 400 μϵ of Rayleigh wave and S4 mode Lamb wave were tested. The temperature test verifies the adaptability of the tensile strain sensor to temperature up to 250°C, and S4 mode Lamb wave and Rayleigh wave represent almost the same temperature characteristics. The strain test demonstrates that S4 mode Lamb wave shows much higher strain sensitivity (-0.48 ppm/μϵ) than Rayleigh wave (0.05 ppm/μϵ) and confirms its advantage of strain sensitivity. Finally, for this one-LWR strain sensor, a method of beat frequency between S4 mode Lamb wave and Rayleigh wave is proposed for temperature compensation and high-sensitivity strain readout.
- ItemGranular metal-carbon nanocomposites as piezoresistive sensor films - Part 1: Experimental results and morphology(Göttingen : Copernicus Publ., 2018) Schultes, Günter; Schmid-Engel, Hanna; Schwebke, Silvan; Werner, UlfWe have produced granular films based on carbon and different transition metals by means of plasma deposition processes. Some of the films possess an increased strain sensitivity compared to metallic films. They respond to strain almost linearly with gauge factors of up to 30 if strained longitudinally, while in the transverse direction about half of the effect is still measured. In addition, the film's thermal coefficient of resistance is adjustable by the metal concentration. The influence of metal concentration was investigated for the elements Ni, Pd, Fe, Pt, W, and Cr, while the elements Co, Au, Ag, Al, Ti, and Cu were studied briefly. Only Ni and Pd have a pronounced strain sensitivity at 55- €±- €5- €at.- €% (atomic percent) of metal, among which Ni–C is far more stable. Two phases are identified by transmission electron microscopy and X-ray diffraction: metal-containing nanocolumns densely packed in a surrounding carbon phase. We differentiate three groups of metals, due to their respective affinity to carbon. It turns out that only nickel has the capability to bond and form a stable and closed encapsulation of GLC around each nanoparticle. In this structure, the electron transport is in part accomplished by tunneling processes across the basal planes of the graphitic encapsulation. Hence, we hold these tunneling processes responsible for the increased gauge factors of Ni–C composites. The other elements are unable to form graphitic encapsulations and thus do not exhibit elevated gauge factors.
- ItemGranular metal-carbon nanocomposites as piezoresistive sensor films-Part 2: Modeling longitudinal and transverse strain sensitivity(Göttingen : Copernicus Publ., 2018) Schwebke, Silvan; Werner, Ulf; Schultes, GünterGranular and columnar nickel-carbon composites may exhibit large strain sensitivity, which makes them an interesting sensor material. Based on experimental results and morphological characterization of the material, we develop a model of the electron transport in the film and use it to explain its piezoresistive effect. First we describe a model for the electron transport from particle to particle. The model is then applied in Monte Carlo simulations of the resistance and strain properties of the disordered films that give a first explanation of film properties. The simulations give insights into the origin of the transverse sensitivity and show the influence of various parameters such as particle separation and geometric disorder. An important influence towards larger strain sensitivity is local strain enhancement due to different elastic moduli of metal particles and carbon matrix.
- ItemStrain sensitivity enhancement in suspended core fiber tapers(Heidelberg : Springer, 2013) André, R.M.; Silva, S.O.; Becker, M.; Schuster, K.; Rothardt, M.; Bartelt, H.; Marques, M.B.; Frazão, O.Suspended core fiber tapers with different cross sections (with diameters from 70 μm to 120 μm) are produced by filament heating. Before obtaining the taper, the spectral behavior of the suspended core fiber is a multimode interference structure. When the taper is made, an intermodal interference between a few modes is observed. This effect is clearly visible for low taper core dimensions. Since the core and cladding do not collapse, two taper regions exist, one in the core and the other in the cladding. The cladding taper does not affect the light transmission, only the core is reduced to a microtaper. The spectral response of the microtaper based-suspended core fiber is similar to a beat of two interferometers. The strain is applied to the microtaper, and with the reduction in the transverse area, an increase in sensitivity is observed. When the taper is immersed in a liquid with a different index of refraction or subjected to temperature variations, no spectral change occurs.