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Author: Güttler, Dominik × End date: 2009 × Start date: 2000 × Has files: Yes × Type: Text × Type: doctoralThesis ×

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Echtzeit-in-situ-Messung der Oberflächenbelegung einer Magnetron-Kathode bei der reaktiven Sputter-Abscheidung

2004, Güttler, Dominik

[no abstract available]

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An investigation of target poisoning during reactive magnetron sputtering

2009, Güttler, Dominik

[no abstract available]

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