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The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication
2021, Deinhart, Victor, Kern, Lisa-Marie, Kirchhof, Jan N., Juergensen, Sabrina, Sturm, Joris, Krauss, Enno, Feichtner, Thorsten, Kovalchuk, Sviatoslav, Schneider, Michael, Engel, Dieter, Pfau, Bastian, Hecht, Bert, Bolotin, Kirill I., Reich, Stephanie, Höflich, Katja
Focused beams of helium ions are a powerful tool for high-fidelity machining with spatial precision below 5 nm. Achieving such a high patterning precision over large areas and for different materials in a reproducible manner, however, is not trivial. Here, we introduce the Python toolbox FIB-o-mat for automated pattern creation and optimization, providing full flexibility to accomplish demanding patterning tasks. FIB-o-mat offers high-level pattern creation, enabling high-fidelity large-area patterning and systematic variations in geometry and raster settings. It also offers low-level beam path creation, providing full control over the beam movement and including sophisticated optimization tools. Three applications showcasing the potential of He ion beam nanofabrication for two-dimensional material systems and devices using FIB-o-mat are presented.
Driving plasmonic nanoantennas at perfect impedance matching using generalized coherent perfect absorption
2021, Grimm, Philipp, Razinskas, Gary, Huang, Jer-Shing, Hecht, Bert
Coherent perfect absorption (CPA) describes the absence of all outgoing modes from a lossy resonator, driven by lossless incoming modes. Here, we show that for nanoresonators that also exhibit radiative losses, e.g., plasmonic nanoantennas, a generalized version of CPA (gCPA) can be applied. In gCPA outgoing modes are suppressed only for a subset of (guided plasmonic) modes while other (radiative) modes are treated as additional loss channels - a situation typically referred to as perfect impedance matching. Here we make use of gCPA to show how to achieve perfect impedance matching between a single nanowire plasmonic waveguide and a plasmonic nanoantenna. Antennas with both radiant and subradiant characteristics are considered. We further demonstrate potential applications in background-free sensing.