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- ItemAluminum based high temperature thin film electrode system for wireless sensors(Rio de Janeiro : Elsevier, 2023) Seifert, Marietta; Leszczynska, Barbara; Menzel, Siegfried B.; Schmidt, Hagen; Gemming, ThomasSelf-sustained, wireless high-temperature stable sensors are developed, which are based on an aluminum alloy as the electrode metallization. Due to its cost-effectiveness accompanied by a high-temperature stability, this alloy substitutes and outperforms the commonly applied expensive Pt- and Ir-based metals. For the first time, a comprehensive structural, electrical and high-frequency characterization of these surface acoustic wave (SAW) sensors is shown. They are based on Catangasite (Ca3TaGa3Si2O14, CTGS) in combination with properly structured cover and barrier layers for the metallization. The frequency characteristics is determined up to 700 °C by ex situ and in situ methods. In addition, the morphology of the AlRu electrodes is analyzed after the thermal loadings and the temperature dependent sheet resistance is measured. The results reveal a reproducible and linear correlation between the applied temperature and the sheet resistance as well as the resonant frequency. In addition, hardly any degradation of the electrodes is detected after the thermal loadings. The observed high-temperature stability of the devices up to at least 700 °C demonstrates the large potential of the AlRu based SAW sensors as a cost-efficient alternative to expensive noble metal based sensors in industrial applications for the support of energy efficient operation.
- ItemLong-term high-temperature behavior of Ti–Al based electrodes for surface acoustic wave devices(Rio de Janeiro : Elsevier, 2022) Seifert, Marietta; Leszczynska, Barbara; Menzel, Siegfried; Gemming, ThomasThe long-term high-temperature behavior of Ti–Al based electrodes for the application in surface acoustic wave (SAW) sensor devices was analyzed. The electrodes were obtained by e-beam evaporation of Ti/Al multilayers on the high-temperature stable piezoelectric Ca3TaGa3Si2O14 (CTGS) substrates and structuring via the lift-off process. AlNO (25 at.% Al; 60 at.% N and 15 at.% O) cover and barrier layers were applied as protection against oxidation from the surrounding atmosphere and to prohibit a chemical reaction with the substrate. The samples were annealed at temperatures up to 600 °C in air for a duration of up to 192 h. Scanning and transmission electron microscopy were used to evaluate the morphology and degradation of the electrodes as well as of the extended contact pads. The results revealed that the Ti–Al based electrodes remained unoxidized after annealing for 192 h at 400 and 500 °C and for 24 h at 600 °C. After the heat treatment for 192 h at 600 °C, a strong oxidation of the structured electrodes occurred, which was less pronounced within the pads. In summary, the investigation showed that Ti–Al based SAW devices are a cost efficient alternative for long-term applications up to at least 500 °C and short- and medium-term applications up to 600 °C.
- ItemDurability of TiAl based surface acoustic wave devices for sensing at intermediate high temperatures(Rio de Janeiro : Elsevier, 2023) Seifert, Marietta; Leszczynska, Barbara; Weser, Robert; Menzel, Siegfried; Gemming, Thomas; Schmidt, HagenTiAl based surface acoustic wave (SAW) devices, which offer a promising cheap and easy to handle wireless sensor solution for intermediate high temperatures up to 600 °C, were prepared and investigated with respect to their durability. To obtain the devices, Ti/Al multilayers were deposited on high-temperature stable piezoelectric catangasite (CTGS) substrates and structured as electrodes via the lift-off technique. AlNO cover layers and barrier layers at the substrate site served as an oxidation protection. The devices were characterized regarding their electrical behavior by ex-situ measurements of their frequency characteristics after heat treatments up to 600 °C in air. In addition, long-term in situ measurements up to 570 °C were performed to analyze a possible drift of the resonant frequency in dependence on the temperature and time. Scanning electron microscopy of the surfaces of the devices and scanning transmission electron microscopy of cross sections of TiAl interdigital transducer electrode fingers and the contact pads were conducted to check the morphology of the electrode metallization and to reveal if degradation or oxidation processes occurred during the heat treatments. The results demonstrated a sufficient high-temperature stability of the TiAl based devices after a first conditioning of system. A linear dependence of the resonant frequency on the temperature of about −37 ppm/K was observed. In summary, the suitability of TiAl based SAW sensors for long-term application at intermediate temperatures was proven.