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In situ measurements with CPC micro-actuators using SEM
2014, Kaasik, Friedrich, Must, Indrek, Lust, Enn, Jürgens, Meelis, Presser, Volker, Punning, Andres, Temmer, Rauno, Kiefer, Rudolf, Aabloo, Alvo
Comparative measurements of carbon-polymer composite micro-actuators based on room temperature ionic liquid electrolyte were carried out in situ (1) in vacuum using a state-of-the-art scanning electron microscope, (2) in an oxygen-free atmosphere under ambient pressure, and (3) under ambient environment. The fabricated micro-actuators sustained their actuation performance in all three environments, revealing important implications regarding their humidity-dependence. SEM observations demonstrate high stroke actuation of a device with submillimeter length, which is the typical size range of actuators desirable for medical or lab-on-chip applications.