Filters

2019 - 201912020 - 20221

More filters

20222
Reset filters

Settings

Author: Nathanael, Jan × Subject: Extreme Ultraviolet ×

Search Results

Now showing 1 - 2 of 2
  • Thumbnail Image
    Item
    Characterization of encapsulated graphene layers using extreme ultraviolet coherence tomography
    (Washington, DC : Soc., 2022) Wiesner, Felix; Skruszewicz, Slawomir; Rödel, Christian; Abel, Johann Jakob; Reinhard, Julius; Wünsche, Martin; Nathanael, Jan; Grünewald, Marco; Hübner, Uwe; Paulus, Gerhard G.; Fuchs, Silvio
    Many applications of two-dimensional materials such as graphene require the encapsulation in bulk material. While a variety of methods exist for the structural and functional characterization of uncovered 2D materials, there is a need for methods that image encapsulated 2D materials as well as the surrounding matter. In this work, we use extreme ultraviolet coherence tomography to image graphene flakes buried beneath 200 nm of silicon. We show that we can identify mono-, bi-, and trilayers of graphene and quantify the thickness of the silicon bulk on top by measuring the depth-resolved reflectivity. Furthermore, we estimate the quality of the graphene interface by incorporating a model that includes the interface roughness. These results are verified by atomic force microscopy and prove that extreme ultraviolet coherence tomography is a suitable tool for imaging 2D materials embedded in bulk materials.
  • Thumbnail Image
    Item
    Laboratory setup for extreme ultraviolet coherence tomography driven by a high-harmonic source
    (Melville, NY : American Inst. of Physics, 2019) Nathanael, Jan; Wünsche, Martin; Fuchs, Silvio; Weber, Thomas; Abel, Johann J.; Reinhard, Julius; Wiesner, Felix; Hübner, Uwe; Skruszewicz, Slawomir J.; Paulus, Gerhard G.; Rödel, Christian
    We present a laboratory beamline dedicated to nanoscale subsurface imaging using extreme ultraviolet coherence tomography (XCT). In this setup, broad-bandwidth extreme ultraviolet (XUV) radiation is generated by a laser-driven high-harmonic source. The beamline is able to handle a spectral range of 30-130 eV and a beam divergence of 10 mrad (full width at half maximum). The XUV radiation is focused on the sample under investigation, and the broadband reflectivity is measured using an XUV spectrometer. For the given spectral window, the XCT beamline is particularly suited to investigate silicon-based nanostructured samples. Cross-sectional imaging of layered nanometer-scale samples can be routinely performed using the laboratory-scale XCT beamline. A depth resolution of 16 nm has been achieved using the spectral range of 36-98 eV which represents a 33% increase in resolution due to the broader spectral range compared to previous work. © 2019 Author(s).