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Author: Plentz, Jonathan × DDC: 530 ×

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Now showing 1 - 4 of 4
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    Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
    (New York, NY : Inst., 2021) Knehr, Emanuel; Ziegler, Mario; Linzen, Sven; Ilin, Konstantin; Schanz, Patrick; Plentz, Jonathan; Diegel, Marco; Schmidt, Heidemarie; Il’iche, Evgeni; Siegel, Michael
    Superconducting niobium nitride thin films are used for a variety of photon detectors, quantum devices, and superconducting electronics. Most of these applications require highly uniform films, for instance, when moving from single-pixel detectors to arrays with a large active area. Plasma-enhanced atomic layer deposition (ALD) of superconducting niobium nitride is a feasible option to produce high-quality, conformal thin films and has been demonstrated as a film deposition method to fabricate superconducting nanowire single-photon detectors before. Here, we explore the property spread of ALD-NbN across a 6-in. wafer area. Over the equivalent area of a 2-in. wafer, we measure a maximum deviation of 1% in critical temperature and 12% in switching current. Toward larger areas, structural characterizations indicate that changes in the crystal structure seem to be the limiting factor rather than film composition or impurities. The results show that ALD is suited to fabricate NbN thin films as a material for large-area detector arrays and for new detector designs and devices requiring uniform superconducting thin films with precise thickness control.
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    Experimental realization of a 12,000-finesse laser cavity based on a low-noise microstructured mirror
    (London : Springer Nature, 2023) Dickmann, Johannes; Sauer, Steffen; Meyer, Jan; Gaedtke, Mika; Siefke, Thomas; Brückner, Uwe; Plentz, Jonathan; Kroker, Stefanie
    The most precise measurement tools of humankind are equipped with ultra-stable lasers. State-of-the-art laser stabilization techniques are based on external cavities, that are limited by noise originated in the coatings of the cavity mirrors. Microstructured mirror coatings (so-called meta-mirrors) are a promising technology to overcome the limitations of coating noise and therewith pave the way towards next-generation ultra-stable lasers. We present experimental realization of a 12,000-finesse optical cavity based on one low-noise meta-mirror. The use of the mirrors studied here in cryogenic silicon cavities represents an order of magnitude reduction in the current limiting mirror noise, such that the stability limit due to fundamental noise can be reduced to 5 × 10−18.
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    Absolute EUV reflectivity measurements using a broadband high-harmonic source and an in situ single exposure reference scheme
    (Washington, DC : Soc., 2022) Abel, Johann J.; Wiesner, Felix; Nathanael, Jan; Reinhard, Julius; Wünsche, Martin; Schmidl, Gabriele; Gawlik, Annett; Hübner, Uwe; Plentz, Jonathan; Rödel, Christian; Paulus, Gerhard G.; Fuchs, Silvio
    We present a tabletop setup for extreme ultraviolet (EUV) reflection spectroscopy in the spectral range from 40 to 100 eV by using high-harmonic radiation. The simultaneous measurements of reference and sample spectra with high energy resolution provide precise and robust absolute reflectivity measurements, even when operating with spectrally fluctuating EUV sources. The stability and sensitivity of EUV reflectivity measurements are crucial factors for many applications in attosecond science, EUV spectroscopy, and nano-scale tomography. We show that the accuracy and stability of our in situ referencing scheme are almost one order of magnitude better in comparison to subsequent reference measurements. We demonstrate the performance of the setup by reflective near-edge x-ray absorption fine structure measurements of the aluminum L2/3 absorption edge in α-Al2O3 and compare the results to synchrotron measurements.
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    Fabrication of self-assembled spherical Gold Particles by pulsed UV Laser Treatment
    (Berlin : Nature Publishing, 2018) Schmidl, Gabriele; Jia, Guobin; Gawlik, Annett; Kreusch, Jonathan; Schmidl, Frank; Dellith, Jan; Dathe, André; Lin, Zhan-Hong; Huang, Jer-Shing; Plentz, Jonathan
    We report on the fabrication of spherical Au spheres by pulsed laser treatment using a KrF excimer laser (248 nm, 25 ns) under ambient conditions as a fast and high throughput fabrication technique. The presented experiments were realized using initial Au layers of 100 nm thickness deposited on optically transparent and low cost Borofloat glass or single-crystalline SrTiO3 substrates, respectively. High (111)-orientation and smoothness (RMS ≈ 1 nm) are the properties of the deposited Au layers before laser treatment. After laser treatment, spheres with size distribution ranging from hundreds of nanometers up to several micrometers were produced. Single-particle scattering spectra with distinct plasmonic resonance peaks are presented to reveal the critical role of optimal irradiation parameters in the process of laser induced particle self-assembly. The variation of irradiation parameters like fluence and number of laser pulses influences the melting, dewetting and solidification process of the Au layers and thus the formation of extremely well shaped spherical particles. The gold layers on Borofloat glass and SrTiO3 are found to show a slightly different behavior under laser treatment. We also discuss the effect of substrates.We report on the fabrication of spherical Au spheres by pulsed laser treatment using a KrF excimer laser (248 nm, 25 ns) under ambient conditions as a fast and high throughput fabrication technique. The presented experiments were realized using initial Au layers of 100 nm thickness deposited on optically transparent and low cost Borofloat glass or single-crystalline SrTiO3 substrates, respectively. High (111)-orientation and smoothness (RMS ≈ 1 nm) are the properties of the deposited Au layers before laser treatment. After laser treatment, spheres with size distribution ranging from hundreds of nanometers up to several micrometers were produced. Single-particle scattering spectra with distinct plasmonic resonance peaks are presented to reveal the critical role of optimal irradiation parameters in the process of laser induced particle self-assembly. The variation of irradiation parameters like fluence and number of laser pulses influences the melting, dewetting and solidification process of the Au layers and thus the formation of extremely well shaped spherical particles. The gold layers on Borofloat glass and SrTiO3 are found to show a slightly different behavior under laser treatment. We also discuss the effect of substrates.