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Author: Porteanu, Horia-Eugen × End date: 2024 × Start date: 2020 × Has files: Yes × Publisher: Bristol : IOP Publ. × WGL Institute: FBH ×

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    Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements
    (Bristol : IOP Publ., 2021) Klute, Michael; Kemaneci, Efe; Porteanu, Horia-Eugen; Stefanović, Ilija; Heinrich, Wolfgang; Awakowicz, Peter; Brinkmann, Ralf Peter
    The MMWICP (miniature microwave ICP) is a new plasma source using the induction principle. Recently Klute et al presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitrogen, based on the chemical reaction set of Thorsteinsson and Gudmundsson and customized for the geometry of the MMWICP. The combined model delivers a quantitative description for a non-thermal plasma at a pressure of p = 1000 Pa and a gas temperature of Tg = 650–1600 K. Comparison with published experimental data shows a good agreement for the volume averaged plasma parameters at high power, for the spatial distribution of the discharge and for the microwave measurements. Furthermore, the balance of capacitive and inductive coupling in the absorbed power is analyzed. This leads to the interpretation of the discharge regime at an electron density of ne ≈ 6.4 × 1018 m−3 as E/H-hybridmode with an capacitive and inductive component.
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    Theoretical investigation of a miniature microwave driven plasma jet
    (Bristol : IOP Publ., 2020) Klute, Michael; Porteanu, Horia-Eugen; Stefanovic, Ilija; Heinrich, Wolfgang; Awakowicz, Peter; Brinkmann, Ralf Peter
    Radio frequency driven plasma jets are compact plasma sources which are used in many advanced fields such as surface engineering or biomedicine. The MMWICP (miniature micro wave ICP) is a particular variant of that device class. Unlike other plasma jets which employ capacitive coupling, the MMWICP uses the induction principle. The jet is integrated into a miniature cavity structure which realizes an LC-resonator with a high quality factor. When excited at its resonance frequency, the resonator develops a high internal current which—transferred to the plasma via induction—provides an efficient source of RF power. This work presents a theoretical model of the MMWICP. The possible operation points of the device are analyzed. Two different regimes can be identified, the capacitive E-mode with a plasma density of ne ≈ 5 × 1017 m−3, and the inductive H-mode with densities of ne ⩾ 1019 m−3. The E to H transition shows a pronounced hysteresis behavior.