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    A new dimension for magnetosensitive e-skins: active matrix integrated micro-origami sensor arrays
    ([London] : Nature Publishing Group UK, 2022) Becker, Christian; Bao, Bin; Karnaushenko, Dmitriy D.; Bandari, Vineeth Kumar; Rivkin, Boris; Li, Zhe; Faghih, Maryam; Karnaushenko, Daniil; Schmidt, Oliver G.
    Magnetic sensors are widely used in our daily life for assessing the position and orientation of objects. Recently, the magnetic sensing modality has been introduced to electronic skins (e-skins), enabling remote perception of moving objects. However, the integration density of magnetic sensors is limited and the vector properties of the magnetic field cannot be fully explored since the sensors can only perceive field components in one or two dimensions. Here, we report an approach to fabricate high-density integrated active matrix magnetic sensor with three-dimensional (3D) magnetic vector field sensing capability. The 3D magnetic sensor is composed of an array of self-assembled micro-origami cubic architectures with biased anisotropic magnetoresistance (AMR) sensors manufactured in a wafer-scale process. Integrating the 3D magnetic sensors into an e-skin with embedded magnetic hairs enables real-time multidirectional tactile perception. We demonstrate a versatile approach for the fabrication of active matrix integrated 3D sensor arrays using micro-origami and pave the way for new electronic devices relying on the autonomous rearrangement of functional elements in space.
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    Silicon-Based Integrated Label-Free Optofluidic Biosensors: Latest Advances and Roadmap
    (Weinheim : Wiley, 2020) Wang, Jiawei; Medina Sanchez, Mariana; Yin, Yin; Herzer, Raffael; Ma, Libo; Schmidt, Oliver G.
    By virtue of the well-developed micro- and nanofabrication technologies and rapidly progressing surface functionalization strategies, silicon-based devices have been widely recognized as a highly promising platform for the next-generation lab-on-a-chip bioanalytical systems with a great potential for point-of-care medical diagnostics. Herein, an overview of the latest advances in silicon-based integrated optofluidic label-free biosensing technologies relying on the efficient interactions between the evanescent light field at the functionalized surface and specifically bound analytes is presented. State-of-the-art technologies demonstrating label-free evanescent wave-based biomarker detection mainly encompass three device configurations, including on-chip waveguide-based interferometers, microring resonators, and photonic-crystal-based cavities. Moreover, up-to-date strategies for elevating the sensitivities and also simplifying the sensing processes are discussed. Emerging laboratory prototypes with advanced integration and packaging schemes incorporating automatic microfluidic components or on-chip optoelectronic devices lead to one significant step forward in real applications of decentralized diagnostics. Besides, particular attention is paid to currently commercialized label-free optical bioanalytical models on the market. Finally, the prospects are elaborated with several research routes toward chip-scale, low-cost, highly sensitive, multi-functional, and user-friendly bioanalytical systems benefiting to global healthcare. © 2020 The Authors. Published by WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim