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    A Novel Large-Scale, Multilayer, and Facilely Aligned Micropatterning Technique Based on Flexible and Reusable SU-8 Shadow Masks
    (Weinheim : Wiley, 2019) Moradi, Somayeh; Bandari, Nooshin; Bandari, Vineeth Kumar; Zhu, Feng; Schmidt, Oliver G.
    A simple method to fabricate flexible, mechanically robust, and reusable SU-8 shadow masks is demonstrated. This shadow mask technology has high pattern flexibility as various shapes with different dimensions can be created. The fabricated shadow masks are characterized in terms of the resolution, reusability, and capability of multilayer surface micropatterning. Fabrication of a new plastic photomask for the exposure process simplifies the shadow mask fabrication process and results in higher resolution in the shadow mask structures compared to the commercial chromium photomasks. For the multilayer surface micropatterning technology, a simple and fast alignment technique based on SU-8 pillars and without usage of any microscopic tools is reported. This unique method leads to a less complicated alignment process with the alignment accuracy of ≈2 µm. The proposed shadow mask technology can be easily employed for wafer-scale micropatterning process. The capability of fabricated SU-8 shadow masks in micropatterning on polymer thin films is evaluated by fabricating metallic contacts on poly(3,4-ethylenedioxythiophene) samples and electrical characterization. © 2019 The Authors. Published by WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
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    Silicon-Based Integrated Label-Free Optofluidic Biosensors: Latest Advances and Roadmap
    (Weinheim : Wiley, 2020) Wang, Jiawei; Medina Sanchez, Mariana; Yin, Yin; Herzer, Raffael; Ma, Libo; Schmidt, Oliver G.
    By virtue of the well-developed micro- and nanofabrication technologies and rapidly progressing surface functionalization strategies, silicon-based devices have been widely recognized as a highly promising platform for the next-generation lab-on-a-chip bioanalytical systems with a great potential for point-of-care medical diagnostics. Herein, an overview of the latest advances in silicon-based integrated optofluidic label-free biosensing technologies relying on the efficient interactions between the evanescent light field at the functionalized surface and specifically bound analytes is presented. State-of-the-art technologies demonstrating label-free evanescent wave-based biomarker detection mainly encompass three device configurations, including on-chip waveguide-based interferometers, microring resonators, and photonic-crystal-based cavities. Moreover, up-to-date strategies for elevating the sensitivities and also simplifying the sensing processes are discussed. Emerging laboratory prototypes with advanced integration and packaging schemes incorporating automatic microfluidic components or on-chip optoelectronic devices lead to one significant step forward in real applications of decentralized diagnostics. Besides, particular attention is paid to currently commercialized label-free optical bioanalytical models on the market. Finally, the prospects are elaborated with several research routes toward chip-scale, low-cost, highly sensitive, multi-functional, and user-friendly bioanalytical systems benefiting to global healthcare. © 2020 The Authors. Published by WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim