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    Durability of TiAl based surface acoustic wave devices for sensing at intermediate high temperatures
    (Rio de Janeiro : Elsevier, 2023) Seifert, Marietta; Leszczynska, Barbara; Weser, Robert; Menzel, Siegfried; Gemming, Thomas; Schmidt, Hagen
    TiAl based surface acoustic wave (SAW) devices, which offer a promising cheap and easy to handle wireless sensor solution for intermediate high temperatures up to 600 °C, were prepared and investigated with respect to their durability. To obtain the devices, Ti/Al multilayers were deposited on high-temperature stable piezoelectric catangasite (CTGS) substrates and structured as electrodes via the lift-off technique. AlNO cover layers and barrier layers at the substrate site served as an oxidation protection. The devices were characterized regarding their electrical behavior by ex-situ measurements of their frequency characteristics after heat treatments up to 600 °C in air. In addition, long-term in situ measurements up to 570 °C were performed to analyze a possible drift of the resonant frequency in dependence on the temperature and time. Scanning electron microscopy of the surfaces of the devices and scanning transmission electron microscopy of cross sections of TiAl interdigital transducer electrode fingers and the contact pads were conducted to check the morphology of the electrode metallization and to reveal if degradation or oxidation processes occurred during the heat treatments. The results demonstrated a sufficient high-temperature stability of the TiAl based devices after a first conditioning of system. A linear dependence of the resonant frequency on the temperature of about −37 ppm/K was observed. In summary, the suitability of TiAl based SAW sensors for long-term application at intermediate temperatures was proven.
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    Micromagnetic investigation of domain and domain wall evolution through the spin-reorientation transition of an epitaxial NdCo5 film
    ([London] : IOP, 2017-3-1) Seifert, Marietta; Schultz, Ludwig; Schäfer, Rudolf; Hankemeier, Sebastian; Frömter, Robert; Oepen, Hans Peter; Neu, Volker
    The domain pattern and the domain wall microstructure throughout the spin-reorientation transition of an epitaxial NdCo5 thin film are investigated by micromagnetic simulations. The temperature-dependent anisotropy constants K1 and K2, which define the anisotropy energy term in the model, are chosen to reflect the easy axis—easy cone—easy plane spin-reorientation transition observed in epitaxial NdCo5 thin films. Starting at the high-temperature easy c-axis regime, the anisotropy constants are changed systematically corresponding to a lowering of the temperature of the system. The character of the domain walls and their profiles are analysed. The calculated domain configurations are compared to the experimentally observed temperature-dependent domain structure of an in-plane textured NdCo5 thin film.
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    XPS chemical state analysis of sputter depth profiling measurements for annealed TiAl-SiO2 and TiAl-W layer stacks
    (Chichester [u.a.] : Wiley, 2020) Oswald, Steffen; Lattner, Eric; Seifert, Marietta
    For the application of surface acoustic wave sensors at high temperatures, both a high-temperature stable piezoelectric substrate and a suitable metallization for the electrodes are needed. Our current attempt is to use TiAl thin films as metallization because this material is also known to be high temperature stable. In this study, Ti/Al multilayers and Ti-Al alloy layers were prepared in combination with an SiO2 cover layer or a W barrier layer at the interface to the substrate (thermally oxidized Si or Ca3TaGa3Si2O14) as an oxidation protection. To form the high-temperature stable γ-TiAl phase and to test the thermal stability of the layer systems, thermal treatments were done in vacuum at several temperatures. We used X-ray photoelectron spectroscopy (XPS) sputter depth-profiling to investigate the film composition and oxidation behavior. In this paper, we demonstrate how the semiautomatic peak fitting can help to extract beside the elemental information also the chemical information from the measured depth profiles. © 2020 The Authors. Surface and Interface Analysis published by John Wiley & Sons Ltd