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    Towards Green 3D-Microfabrication of Bio-MEMS Devices Using ADEX Dry Film Photoresists
    (Berlin ; Heidelberg : Springer, 2022) Roos, Michael M.; Winkler, Andreas; Nilsen, Madeleine; Menzel, Siegfried B.; Strehle, Steffen
    Current trends in miniaturized diagnostics indicate an increasing demand for large quantities of mobile devices for health monitoring and point-of-care diagnostics. This comes along with a need for rapid but preferably also green microfabrication. Dry film photoresists (DFPs) promise low-cost and greener microfabrication and can partly or fully replace conventional silicon-technologies being associated with high-energy demands and the intense use of toxic and climate-active chemicals. Due to their mechanical stability and superior film thickness homogeneity, DFPs outperform conventional spin-on photoresists, such as SU-8, especially when three-dimensional architectures are required for micro-analytical devices (e.g. microfluidics). In this study, we utilize the commercial epoxy-based DFP ADEX to demonstrate various application scenarios ranging from the direct modification of microcantilever beams via the assembly of microfluidic channels to lamination-free patterning of DFPs, which employs the DFP directly as a substrate material. Finally, kinked, bottom-up grown silicon nanowires were integrated in this manner as prospective ion-sensitive field-effect transistors in a bio-probe architecture directly on ADEX substrates. Hence, we have developed the required set of microfabrication protocols for such an assembly comprising metal thin film deposition, direct burn-in of lithography alignment markers, and polymer patterning on top of the DFP.
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    A Holistic Solution to Icing by Acoustic Waves: De-Icing, Active Anti-Icing, Sensing with Piezoelectric Crystals, and Synergy with Thin Film Passive Anti-Icing Solutions
    (Weinheim : Wiley-VCH, 2023) del Moral, Jaime; Montes, Laura; Rico‐Gavira, Victor Joaquin; López‐Santos, Carmen; Jacob, Stefan; Oliva‐Ramirez, Manuel; Gil‐Rostra, Jorge; Fakhfouri, Armaghan; Pandey, Shilpi; Gonzalez del Val, Miguel; Mora, Julio; García‐Gallego, Paloma; Ibáñez‐Ibáñez, Pablo Francisco; Rodríguez‐Valverde, Miguel Angel; Winkler, Andreas; Borrás, Ana; González‐Elipe, Agustin Rodriguez
    Icing has become a hot topic both in academia and in the industry given its implications in transport, wind turbines, photovoltaics, and telecommunications. Recently proposed de-icing solutions involving the propagation of acoustic waves (AWs) at suitable substrates may open the path for a sustainable alternative to standard de-icing or anti-icing procedures. Herein, the fundamental interactions are unraveled that contribute to the de-icing and/or hinder the icing on AW-activated substrates. The response toward icing of a reliable model system consisting of a piezoelectric plate activated by extended electrodes is characterized at a laboratory scale and in an icing wind tunnel under realistic conditions. Experiments show that surface modification with anti-icing functionalities provides a synergistic response when activated with AWs. A thoughtful analysis of the resonance frequency dependence on experimental variables such as temperature, ice formation, or wind velocity demonstrates the application of AW devices for real-time monitoring of icing processes.