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End date: 2019 × Start date: 2000 × DDC: 530 × Subject: actuator × WGL Institute: INM ×

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    In situ measurements with CPC micro-actuators using SEM
    (Bellingham : SPIE, 2014) Kaasik, Friedrich; Must, Indrek; Lust, Enn; Jürgens, Meelis; Presser, Volker; Punning, Andres; Temmer, Rauno; Kiefer, Rudolf; Aabloo, Alvo
    Comparative measurements of carbon-polymer composite micro-actuators based on room temperature ionic liquid electrolyte were carried out in situ (1) in vacuum using a state-of-the-art scanning electron microscope, (2) in an oxygen-free atmosphere under ambient pressure, and (3) under ambient environment. The fabricated micro-actuators sustained their actuation performance in all three environments, revealing important implications regarding their humidity-dependence. SEM observations demonstrate high stroke actuation of a device with submillimeter length, which is the typical size range of actuators desirable for medical or lab-on-chip applications.