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Güttler, Dominik
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2009
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Dresden : Forschungszentrum Dresden-Rossendorf
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Wissenschaftlich-technische Berichte / FZD, Forschungszentrum Dresden-Rossendorf, Volume 515, ISSN 1437-322X
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End date: 2009
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search.filters.applied.f.series: Wissenschaftlich-technische Berichte / FZD, Forschungszentrum Dresden-Rossendorf, Volume 515, ISSN 1437-322X
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An investigation of target poisoning during reactive magnetron sputtering
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2009
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Güttler, Dominik
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[no abstract available]
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