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Güttler, Dominik
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2004
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Dresden : Forschungszentrum Dresden-Rossendorf
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Wissenschaftlich-technische Berichte / FZR, Forschungszentrum Rossendorf, Volume 411, ISSN 1437-322X
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End date: 2009
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Start date: 2000
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search.filters.applied.f.series: Wissenschaftlich-technische Berichte / FZR, Forschungszentrum Rossendorf, Volume 411, ISSN 1437-322X
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Echtzeit-in-situ-Messung der Oberflächenbelegung einer Magnetron-Kathode bei der reaktiven Sputter-Abscheidung
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Güttler, Dominik
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