Search Results
High-temperature annealing of AlN films grown on 4H-SiC
2020, Brunner, F., Cancellara, L., Hagedorn, S., Albrecht, M., Weyers, M.
The effect of high-temperature annealing (HTA) at 1700 °C on AlN films grown on 4H-SiC substrates by metalorganic vapor phase epitaxy has been studied. It is shown that the structural quality of the AlN layers improves significantly after HTA similar to what has been demonstrated for AlN grown on sapphire. Dislocation densities reduce by one order of magnitude resulting in 8 × 108 cm-2 for a-type and 1 × 108 cm-2 for c-type dislocations. The high-temperature treatment removes pits from the surface by dissolving nanotubes and dislocations in the material. XRD measurements prove that the residual strain in AlN/4H-SiC is further relaxed after annealing. AlN films grown at higher temperature resulting in a lower as-grown defect density show only a marginal reduction in dislocation density after annealing. Secondary ion mass spectrometry investigation of impurity concentrations reveals an increase of Si after HTA probably due to in-diffusion from the SiC substrate. However, C concentration reduces considerably with HTA that points to an efficient carbon removal process (i.e., CO formation). © 2020 Author(s).
Importance of substrates for the visibility of "dark" plasmonic modes
2020, Fiedler, Saskia, Raza, Søren, Ai, Ruoqi, Wang, Jianfang, Busch, Kurt, Stenger, Nicolas, Mortensen, N. Asger, Wolff, Christian
Dark plasmonic modes have interesting properties, including longer lifetimes and narrower linewidths than their radiative counterpart, and little to no radiative losses. However, they have not been extensively studied yet due to their optical inaccessibility. In this work, we systematically investigated the dark radial breathing modes (RBMs) in monocrystalline gold nanodisks, specifically their outcoupling behavior into the far-field by cathodoluminescence spectroscopy. Increasing the substrate thickness resulted in an up to 4-fold enhanced visibility. This is attributed to breaking the mirror symmetry by the high-index substrate, creating an effective dipole moment. Furthermore, the resonance energy of the dark RMBs can be easily tuned by varying the nanodisk diameter, making them promising candidates for nanophotonic applications. © 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Interplay of electric field and disorder in Dirac liquid silicene
2021, Craco, L., Carara, S.S., Leoni, S.
Layered materials with buckled structure offer a promising route to explore distinct phases of quantum matter. Using GGA + DMFT we reveal the complex interplay between perpendicular electric field and site-diagonal disorder in the Dirac liquid electronic state of silicene. The electronic structure we derive is promising in the sense that it leads to results that might explain why out-of-plane electric field plus moderate disorder can generate marginal Dirac valleys consistent with scanning tunneling spectroscopy of silicene on Ag substrates.
High temperature behavior of rual thin films on piezoelectric CTGS and LGS substrates
2020, Seifert, M.
This paper reports on a significant further improvement of the high temperature stability of RuAl thin films (110 nm) on the piezoelectric Ca3TaGa3Si2O14 (CTGS) and La3Ga5SiO14 (LGS) substrates. RuAl thin films with AlN or SiO2 cover layers and barriers to the substrate (each 20 nm), as well as a combination of both were prepared on thermally oxidized Si substrates, which serve as a reference for fundamental studies, and the piezoelectric CTGS, as well as LGS substrates. In somefilms, additional Al layers were added. To study their high temperature stability, the samples were annealed in air and in high vacuum up to 900 °C, and subsequently their cross-sections, phase formation, film chemistry, and electrical resistivity were analyzed. It was shown that on thermally oxidized Si substrates, all films were stable after annealing in air up to 800 °C and in high vacuum up to 900 °C. The high temperature stability of RuAl thin films on CTGS substrates was improved up to 900 °C in high vacuum by the application of a combined AlN/SiO2 barrier layer and up to 800 °C in air using a SiO2 barrier. On LGS, the films were only stable up to 600 °C in air; however, a single SiO2 barrier layer was sufficient to prevent oxidation during annealing at 900 °C in high vacuum.
Quantitative protein sensing with germanium THz-antennas manufactured using CMOS processes
2022, Hardt, Elena, Chavarin, Carlos Alvarado, Gruessing, Soenke, Flesch, Julia, Skibitzki, Oliver, Spirito, Davide, Vita, Gian Marco, Simone, Giovanna De, Masi, Alessandra di, You, Changjiang, Witzigmann, Bernd, Piehler, Jacob, Capellini, Giovanni
The development of a CMOS manufactured THz sensing platform could enable the integration of state-of-the-art sensing principles with the mixed signal electronics ecosystem in small footprint, low-cost devices. To this aim, in this work we demonstrate a label-free protein sensing platform using highly doped germanium plasmonic antennas realized on Si and SOI substrates and operating in the THz range of the electromagnetic spectrum. The antenna response to different concentrations of BSA shows in both cases a linear response with saturation above 20 mg/mL. Ge antennas on SOI substrates feature a two-fold sensitivity as compared to conventional Si substrates, reaching a value of 6 GHz/(mg/mL), which is four-fold what reported using metal-based metamaterials. We believe that this result could pave the way to a low-cost lab-on-a-chip biosensing platform.
Slowness curve surface acoustic wave transducers for optimized acoustic streaming
2020, O'Rorke, R., Winkler, A., Collins, D., Ai, Y.
Surface acoustic waves can induce force gradients on the length scales of micro- and nanoparticles, allowing precise manipulation for particle capture, alignment and sorting activities. These waves typically occupy a spatial region much larger than a single particle, resulting in batch manipulation. Circular arc transducers can focus a SAW into a narrow beam on the order of the particle diameter for highly localised, single-particle manipulation by exciting wavelets which propagate to a common focal point. The anisotropic nature of SAW substrates, however, elongates and shifts the focal region. Acousto-microfluidic applications are highly dependent on the morphology of the underlying substrate displacement and, thus, become dependent on the microchannel position relative to the circular arc transducer. This requires either direct measurement or computational modelling of the SAW displacement field. We show that the directly measured elongation and shift in the focal region are recapitulated by an analytical model of beam steering, derived from a simulated slowness curve for 128° Y-cut lithium niobate. We show how the negative effects of beam steering can be negated by adjusting the curvature of arced transducers according to the slowness curve of the substrate, for which we present a simple function for convenient implementation in computational design software. Slowness-curve adjusted transducers do not require direct measurement of the SAW displacement field for microchannel placement and can capture smaller particles within the streaming vortices than can circular arc IDTs.
Phase formation and high-temperature stability of very thin co-sputtered Ti-Al and multilayered Ti/Al films on thermally oxidized si substrates
2020, Seifert, M., Lattner, E., Menzel, S.B., Oswald, S., Gemming, T.
Ti-Al thin films with a thickness of 200 nm were prepared either by co-sputtering from elemental Ti and Al targets or as Ti/Al multilayers with 10 and 20 nm individual layer thickness on thermally oxidized Si substrates. Some of the films were covered with a 20-nm-thick SiO2 layer, which was used as an oxidation protection against the ambient atmosphere. The films were annealed at up to 800 °C in high vacuum for 10 h, and the phase formation as well as the film architecture was analyzed by X-ray diffraction, cross section, and transmission electron microscopy, as well as Auger electron and X-ray photoelectron spectroscopy. The results reveal that the co-sputtered films remained amorphous after annealing at 600 °C independent on the presence of the SiO2 cover layer. In contrast to this, the γ-TiAl phase was formed in the multilayer films at this temperature. After annealing at 800 °C, all films were degraded completely despite the presence of the cover layer. In addition, a strong chemical reaction between the Ti and SiO2 of the cover layer and the substrate took place, resulting in the formation of Ti silicide. In the multilayer samples, this reaction already started at 600 °C.
Mueller matrix imaging microscope using dual continuously rotating anisotropic mirrors
2021, Ruder, Alexander, Wright, Brandon, Feder, Rene, Kilic, Ufuk, Hilfiker, Matthew, Schubert, Eva, Herzinger, Craig M., Schubert, Mathias
We demonstrate calibration and operation of a Mueller matrix imaging microscope using dual continuously rotating anisotropic mirrors for polarization state generation and analysis. The mirrors contain highly spatially coherent nanostructure slanted columnar titanium thin films deposited onto optically thick titanium layers on quartz substrates. The first mirror acts as polarization state image generator and the second mirror acts as polarization state image detector. The instrument is calibrated using samples consisting of laterally homogeneous properties such as straight-through-air, a clear aperture linear polarizer, and a clear aperture linear retarder waveplate. Mueller matrix images are determined for spatially varying anisotropic samples consisting of a commercially available (Thorlabs) birefringent resolution target and a spatially patterned titanium slanted columnar thin film deposited onto a glass substrate. Calibration and operation are demonstrated at a single wavelength (530 nm) only, while, in principle, the instrument can operate regardless of wavelength. We refer to this imaging ellipsometry configuration as rotating-anisotropic-mirror-sample-rotating-anisotropic-mirror ellipsometry (RAM-S-RAM-E).
Impact of surface charge on the motion of light-activated Janus micromotors
2021, Huang, Tao, Ibarlucea, Bergoi, Caspari, Anja, Synytska, Alla, Cuniberti, Gianaurelio, de Graaf, Joost, Baraban, Larysa
Control over micromotors' motion is of high relevance for lab-on-a-chip and biomedical engineering, wherein such particles encounter complex microenvironments. Here, we introduce an efficient way to influence Janus micromotors' direction of motion and speed by modifying their surface properties and those of their immediate surroundings. We fabricated light-responsive Janus micromotors with positive and negative surface charge, both driven by ionic self-diffusiophoresis. These were used to observe direction-of-motion reversal in proximity to glass substrates for which we varied the surface charge. Quantitative analysis allowed us to extract the dependence of the particle velocity on the surface charge density of the substrate. This constitutes the first quantitative demonstration of the substrate's surface charge on the motility of the light-activated diffusiophoretic motors in water. We provide qualitative understanding of these observations in terms of osmotic flow along the substrate generated through the ions released by the propulsion mechanism. Our results constitute a crucial step in moving toward practical application of self-phoretic artificial micromotors.