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End date: 2024 × Start date: 2020 × DDC: 530 × Subject: Ge × WGL Institute: IHP ×

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    Vertical alignment control of self-ordered multilayered Ge nanodots on SiGe
    (Bristol : IOP Publ., 2023) Wen, Wei-Chen; Schubert, Markus Andreas; Tillack, Bernd; Yamamoto, Yuji
    Self-ordered multilayered Ge nanodots with SiGe spacers on a Si0.4Ge0.6 virtual substrate are fabricated using reduced-pressure chemical vapor deposition, and the mechanism of vertical ordering is investigated. The process conditions of Ge and SiGe layer deposition are H2-GeH4 at 550 °C and H2-SiH4-GeH4 at 500 °C-550 °C, respectively. By depositing the SiGe at 550 °C or increasing Ge content, the SiGe surface becomes smooth, resulting in vertically aligned Ge nanodots to reduce strain energy. Ge nanodots prefer to grow on the nanodot where the SiGe is relatively tensile strained due to the buried Ge nanodot underneath. By depositing at 500 °C and lowering Ge content, checkerboard-like surface forms, and the following Ge nanodots grow at staggered positions to reduce surface energy. The Ge nanodots are laterally aligned along the elastically soft 〈100〉 direction without pre-structuring resulting from the strain distribution.
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    Ge(Sn) nano-island/Si heterostructure photodetectors with plasmonic antennas
    (Bristol : IOP Publ., 2020) Schlykow, Viktoria; Manganelli, Costanza Lucia; Römer, Friedhard; Clausen, Caterina; Augel, Lion; Schulze, Jörg; Katzer, Jens; Schubert, Michael Andreas; Witzigmann, Bernd; Schroeder, Thomas; Capellini, Giovanni; Fischer, Inga Anita
    We report on photodetection in deep subwavelength Ge(Sn) nano-islands on Si nano-pillar substrates, in which self-aligned nano-antennas in the Al contact metal are used to enhance light absorption by means of local surface plasmon resonances. The impact of parameters such as substrate doping and device geometry on the measured responsivities are investigated and our experimental results are supported by simulations of the three-dimensional distribution of the electromagnetic fields. Comparatively high optical responsivities of about 0.1 A W-1 are observed as a consequence of the excitation of localized surface plasmons, making our nano-island photodetectors interesting for applications in which size reduction is essential. © 2020 The Author(s). Published by IOP Publishing Ltd.