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DDC: 530 × Subject: MEMS ×

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    A compact tube-in-tube microsized lithium-ion battery as an independent microelectric power supply unit
    ([New York, NY] : Elsevier, 2021) Weng, Qunhong; Wang, Sitao; Liu, Lixiang; Lu, Xueyi; Zhu, Minshen; Li, Yang; Gabler, Felix; Schmidt, Oliver G.
    Independent and well-packaged miniaturized energy storage devices (MESDs) are indispensable as power sources or backup units for integrated circuits and many dispersive electronics applications. Challenges associated with MESD development relate to their low packaged areal energy density and poor battery performance. Here, we propose a compact tube-in-tube battery configuration to overcome the areal energy density and packaging problems in microbatteries. Compact microtubular microelectrodes rolled up from patterned nanomembranes are sealed in an inert glass capillary with a thin tube wall. The resultant tube-in-tube microsized lithium-ion batteries (micro-LIBs), based on various active materials, exhibit very high and scalable packaged areal energy densities up to 605 microampere hours per square centimeter (μAh cm−2) or 313 μWh cm−2 with footprints as small as 0.39–0.79 mm2. This approach is a practical alternative for microbattery microelectrode, packaging, and configuration innovations.
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    Micro Fresnel mirror array with individual mirror control
    (Bristol : IOP Publ., 2020) Poyyathuruthy Bruno, Binal; Schütze, Robert; Grunwald, Ruediger; Wallrabe, Ulrike
    We present the design and fabrication of a miniaturized array of piezoelectrically actuated high speed Fresnel mirrors with individual mirror control. These Fresnel mirrors can be used to generate propagation invariant and self-healing interference patterns. The mirrors are actuated using piezobimorph actuators, and the consequent change of the tilting angle of the mirrors changes the fringe spacing of the interference pattern generated. The array consists of four Fresnel mirrors each having an area of 2 × 2 mm2 arranged in a 2x2 configuration. The device, optimized using FEM simulations, is able to achieve maximum mirror deflections of 15 mrad, and has a resonance frequency of 28 kHz.