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DDC: 530 × Subject: SAW ×

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    Measurements of Streams Agitated by Fluid Loaded SAW-devices Using a Volumetric 3-component Measurement Technique (V3V)
    (Amsterdam [u.a.] : Elsevier, 2015) Kiebert, Florian; König, Jörg; Kykal, Carsten; Schmidt, Hagen
    Utilizing surface acoustic waves (SAW) to induce tailored fluid motion via the acoustic streaming requires detailed knowledge about the acoustic bulk wave excitation. For the first time, the Defocus Digital Particle Image Velocimetry is used to measure the fluid motion originating from a fluid loaded SAW-device. With this flow measurement technique, the acoustic streaming-induced fluid motion can be observed volumetrically, which is attractive not only for application, but also for simulation in order to gain deeper insights regarding three-dimensional acoustic effects.
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    XPS chemical state analysis of sputter depth profiling measurements for annealed TiAl-SiO2 and TiAl-W layer stacks
    (Chichester [u.a.] : Wiley, 2020) Oswald, Steffen; Lattner, Eric; Seifert, Marietta
    For the application of surface acoustic wave sensors at high temperatures, both a high-temperature stable piezoelectric substrate and a suitable metallization for the electrodes are needed. Our current attempt is to use TiAl thin films as metallization because this material is also known to be high temperature stable. In this study, Ti/Al multilayers and Ti-Al alloy layers were prepared in combination with an SiO2 cover layer or a W barrier layer at the interface to the substrate (thermally oxidized Si or Ca3TaGa3Si2O14) as an oxidation protection. To form the high-temperature stable γ-TiAl phase and to test the thermal stability of the layer systems, thermal treatments were done in vacuum at several temperatures. We used X-ray photoelectron spectroscopy (XPS) sputter depth-profiling to investigate the film composition and oxidation behavior. In this paper, we demonstrate how the semiautomatic peak fitting can help to extract beside the elemental information also the chemical information from the measured depth profiles. © 2020 The Authors. Surface and Interface Analysis published by John Wiley & Sons Ltd