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DDC: 530 × Subject: surface roughness ×

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    Etching of silicon surfaces using atmospheric plasma jets
    (Bristol : IOP Publ., 2015) Paetzelt, H.; Böhm, G.; Arnold, T.
    Local plasma-assisted etching of crystalline silicon by fine focused plasma jets provides a method for high accuracy computer controlled surface waviness and figure error correction as well as free form processing and manufacturing. We investigate a radio-frequency powered atmospheric pressure He/N2/CF4 plasma jet for the local chemical etching of silicon using fluorine as reactive plasma gas component. This plasma jet tool has a typical tool function width of about 0.5 to 1.8 mm and a material removal rate up to 0.068 mm3 min−1. The relationship between etching rate and plasma jet parameters is discussed in detail regarding gas composition, working distance, scan velocity and RF power. Surface roughness after etching was characterized using atomic force microscopy and white light interferometry. A strong smoothing effect was observed for etching rough silicon surfaces like wet chemically-etched silicon wafer backsides. Using the dwell-time algorithm for a deterministic surface machining by superposition of the local removal function of the plasma tool we show a fast and efficient way for manufacturing complex silicon structures. In this article we present two examples of surface processing using small local plasma jets.
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    Physiological Parameters Relevant to Dissolution Testing - Hydrodynamic Considerations (rev. and suppl. version)
    (Tübingen : Universitätsbibliothek Tübingen, 2023) Diebold, Steffen M.
    The first two sections of the monograph present an introduction into basic hydrodynamics relevant to in vitro dissolution testing including V. G. Levichs convective diffusion theory and the authors combination model. This part is followed by hydrodynamic considerations of in vivo dissolution including hydrodynamic problems inherent to in vivo bioavailability of solid oral dosage forms. Hydrodynamics in the upper GI tract contribute to in vivo dissolution. Our ability to forecast dissolution of poorly soluble drugs in vitro depends on our knowledge of and ability to control hydrodynamics as well as other factors influencing dissolution. Provided suitable conditions (apparatus, hydrodynamics, media) are chosen for the dissolution test, it seems possible to predict dissolution limitations to the oral absorption of drugs and to reflect variations in hydrodynamic conditions in the upper GI tract. The fluid volume available for dissolution in the gut lumen, the contact time of the dissolved compound with the absorptive sites and the particle size have been identified as the main hydrodynamic determinants for the absorption of poorly soluble drugs in vivo. The influence of these factors is usually more pronounced than that of the motility pattern or the gastrointestinal flow rates per se.