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DDC: 620 × Subject: MEMS ×

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    Adaptive micro axicons for laser applications
    (Les Ulis : EDP Sciences, 2015) Wallrabe, Ulrike; Brunne, Jens; Treffer, Alexander; Grunwald, Ruediger; Bellouard, Yves
    We report on the design, fabrication and testing of novel types of low-dispersion axicons for the adaptive shaping of ultrashort laser pulses. An overview is given on the basic geometries and operating principles of our purely reflective adaptive MEMS-type devices based on thermal or piezoelectric actuation. The flexible formation of nondiffracting beams at pulse durations down to a few oscillations of the optical field enables new applications in optical communication, pulse diagnostics, laser-matter interaction and particle manipulation. As an example, we show first promising results of adaptive autocorrelation. The combination of excellent pulse transfer, self-reconstruction properties and propagation invariance of nondiffracting beams with an adaptive approach promises to extend the field of practical applications significantly.
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    Experiments on MEMS Integration in 0.25 μm CMOS Process
    (Basel : MDPI, 2018) Michalik, Piotr; Fernández, Daniel; Wietstruck, Matthias; Kaynak, Mehmet; Madrenas, Jordi
    In this paper, we share our practical experience gained during the development of CMOS-MEMS (Complementary Metal-Oxide Semiconductor Micro Electro Mechanical Systems) devices in IHP SG25 technology. The experimental prototyping process is illustrated with examples of three CMOS-MEMS chips and starts from rough process exploration and characterization, followed by the definition of the useful MEMS design space to finally reach CMOS-MEMS devices with inertial mass up to 4.3 μg and resonance frequency down to 4.35 kHz. Furthermore, the presented design techniques help to avoid several structural and reliability issues such as layer delamination, device stiction, passivation fracture or device cracking due to stress.