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Functional thin films synthesized from liquid precursors by combining mist chambers and atmospheric-pressure plasma polymerization

2021, Barillas, Laura, Makhneva, Ekaterina, An, Sehoon, Fricke, Katja

For the creation of thin films, the use of precursors in liquid phase offers a viable alternative when these chemicals are sensitive to high temperatures and phase changes. However, it requires appropriate liquid handling and deposition technologies capable of dispensing the fluid homogeneously to produce a uniform thin film. We report different tailor-made mist chamber designs integrated in an atmospheric-pressure plasma polymerization process for the synthesis of functional thin polymer films from liquid precursors. A systematic investigation, evaluated by performance indicators, is presented on the characteristics and suitability of metallic 3D-printed mist chambers depending on inner volume, geometry and surface post-treatment, for the deposition of a thin liquid monomer film. To assess the quality of the subsequently obtained plasma-polymerized (pp) films, their properties were characterized in terms of thickness, chemical composition, surface morphology and stability in aqueous environment. It was found that the specification of the mist chambers along with the plasma process parameters influences the pp film’s thickness, surface morphology and degree of monomer conversion. This study is one of the first demonstrations of a controllable process able to tune the cross-linked polymeric chains of plasma-polymers at atmospheric pressure, highlighting the opportunities of using mist chambers and plasma technology to discover tailored organic thin films to materials sciences and life sciences.

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Influence of the active screen plasma power during afterglow nitrocarburizing on the surface modification of aisi 316l

2020, Böcker, Jan, Puth, Alexander, Dalke, Anke, Röpcke, Jürgen, Van Helden, Jean-Pierre H., Biermann, Horst

Active screen plasma nitrocarburizing (ASPNC) increases the surface hardness and lifetime of austenitic stainless steel without deteriorating its corrosion resistance. Using an active screen made of carbon opens up new technological possibilities that have not been exploited to date. In this study, the effect of screen power variation without bias application on resulting concentrations of process gas species and surface modification of AISI 316L steel was studied. The concentrations of gas species (e.g., HCN, NH3, CH4, C2 H2) were measured as functions of the active screen power and the feed gas composition at constant temperature using in situ infrared laser absorption spectroscopy. At constant precursor gas composition, the decrease in active screen power led to a decrease in both the concentrations of the detected molecules and the diffusion depths of nitrogen and carbon. Depending on the gas mixture, a threshold of the active screen power was found above which no changes in the expanded austenite layer thickness were measured. The use of a heating independent of the screen power offers an additional parameter for optimizing the ASPNC process in addition to changes in the feed gas composition and the bias power. In this way, an advanced process control can be established. © 2020 by the authors. Licensee MDPI, Basel, Switzerland.