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Boschker, Jos E.
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Calarco, Raffaella
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81.05Zx New materials: theory, design, and fabrication
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61.72.jd Vacancies
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81.05.Hd Other semiconductors
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81.15.-z Methods of deposition of films and coatings, film growth, and epitaxy
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epitaxy
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Ge2Sb2Te5
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Molecular beam epitaxy
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Phase change materials
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pulsed laser deposition
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sputtering
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2017
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publishedVersion
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2023
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530
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Abingdon : Taylor & Francis Group
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