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Direct transfer of magnetic sensor devices to elastomeric supports for stretchable electronics
2015, Melzer, Michael, Karnaushenko, Daniil, Lin, Gungun, Baunack, Stefan, Makarov, Denys, Schmidt, Oliver G.
A novel fabrication method for stretchable magnetoresistive sensors is introduced, which allows the transfer of a complex microsensor systems prepared on common rigid donor substrates to prestretched elastomeric membranes in a single step. This direct transfer printing method boosts the fabrication potential of stretchable magnetoelectronics in terms of miniaturization and level of complexity, and provides straināinvariant sensors up to 30% tensile deformation.