Search Results
On the relationship between SiF4plasma species and sample properties in ultra low-k etching processes
The temporal behavior of the molecular etching product SiF4 in fluorocarbon-based plasmas used for the dry etching of ultra low-k (ULK) materials has been brought into connection with the polymer deposition on the surface during plasma treatment within the scope of this work. For this purpose, time-resolved measurements of the density of SiF4 have been performed by quantum cascade laser absorption spectroscopy. A quantification of the non-linear time dependence was achieved by its characterization via a time constant of the decreasing SiF4 density over the process time. The time constant predicts how fast the stationary SiF4 density is reached. The higher the time constant is, the thicker the polymer film on top of the treated ultra low-k surface. A correlation between the time constant and the ULK damage was also found. ULK damage and polymer deposition were proven by Variable Angle Spectroscopic Ellipsometry and X-ray Photoelectron Spectroscopy. In summary, the observed decay of the etching product concentration over process time is caused by the suppressed desorption of the SiF4 molecules due to a more dominant adsorption of polymers. © 2020 Author(s).
3D-nanoprinted on-chip antiresonant waveguide with hollow core and microgaps for integrated optofluidic spectroscopy
Here, we unlock the properties of the recently introduced on-chip hollow-core microgap waveguide in the context of optofluidics which allows for intense light-water interaction over long lengths with fast response times. The nanoprinted waveguide operates by the antiresonance effect in the visible and near-infrared domain and includes a hollow core with defined gaps every 176 µm. The spectroscopic capabilities are demonstrated by various absorption-related experiments, showing that the Beer-Lambert law can be applied without any modification. In addition to revealing key performance parameters, time-resolved experiments showed a decisive improvement in diffusion times resulting from the lateral access provided by the microgaps. Overall, the microgap waveguide represents a pathway for on-chip spectroscopy in aqueous environments.
Fiber-integrated hollow-core light cage for gas spectroscopy
Interfacing integrated on-chip waveguides with spectroscopic approaches represents one research direction within current photonics aiming at reducing geometric footprints and increasing device densities. Particularly relevant is to connect chip-integrated waveguides with established fiber-based circuitry, opening up the possibility for a new class of devices within the field of integrated photonics. Here, one attractive waveguide is the on-chip light cage, confining and guiding light in a low-index core through the anti-resonance effect. This waveguide, implemented via 3D nanoprinting and reaching nearly 100% overlap of mode and material of interest, uniquely provides side-wise access to the core region through the open spaces between the cage strands, drastically reducing gas diffusion times. Here, we extend the capabilities of the light cage concept by interfacing light cages and optical fibers, reaching a fully fiber-integrated on-chip waveguide arrangement with its spectroscopic capabilities demonstrated here on the example of tunable diode laser absorption spectroscopy of ammonia. Controlling and optimizing the fiber circuitry integration have been achieved via automatic alignment in etched v-grooves on silicon chips. This successful device integration via 3D nanoprinting highlights the fiber-interfaced light cage to be an attractive waveguide platform for a multitude of spectroscopy-related fields, including bio-analytics, lab-on-chip photonic sensing, chemistry, and quantum metrology. © 2021 Author(s).
RES-Q-Trace: A Mobile CEAS-Based Demonstrator for Multi-Component Trace Gas Detection in the MIR
Sensitive trace gas detection plays an important role in current challenges occurring in areas such as industrial process control and environmental monitoring. In particular, for medical breath analysis and for the detection of illegal substances, e.g., drugs and explosives, a selective and sensitive detection of trace gases in real-time is required. We report on a compact and transportable multi-component system (RES-Q-Trace) for molecular trace gas detection based on cavity-enhanced techniques in the mid-infrared (MIR). The RES-Q-Trace system can operate four independent continuous wave quantum or interband cascade lasers each combined with an optical cavity. Twice the method of off-axis cavity-enhanced absorption spectroscopy (OA-CEAS) was used, twice the method of optical feedback cavity-enhanced absorption spectroscopy (OF-CEAS), respectively. Multi-functional software has been implemented (i) for the general system control; (ii) to drive the four different laser sources and (iii) to analyze the detector signals for concentration determination of several molecular species. For the validation of the versatility and the performance of the RES-Q-Trace instrument the species NO, N2O, CH4, C2H4 and C3H6O, with relevance in the fields of breath gas analysis and the detection of explosives have been monitored in the MIR with detection limits at atmospheric pressure in the ppb and ppt range.
On the efficiency of bile salt for stable suspension and isolation of single-walled carbon nanotubes-spectroscopic and microscopic investigations
In this contribution we present a systematic study on the dispersion of SWCNTs in a water-based solution of biocompatible detergent: sodium deoxycholate (DOC). By avoiding harsh chemical conditions, which are known to damage nanotubes structure, a stable SWCNTs suspension was created. Long term stirring of the solution led to preparation of a stable transparent solution, containing welldispersed isolated SWCNTs. The as-prepared dispersion remained stable and clear for two months. Optical absorption spectroscopy was employed to measure SWCNTs suspension stability. Nanotube aggregation was evaluated through the tangential mode (G mode) present in the Raman spectrum. High-resolution transmission electronmicroscopy was employed to observe the mechanism of debundling process. © 2010 Springer-Verlag.
Highly efficient soft x-ray spectrometer for transient absorption spectroscopy with broadband table-top high harmonic sources
We present a novel soft x-ray spectrometer for ultrafast absorption spectroscopy utilizing table-top femtosecond high-order harmonic sources. Where most commercially available spectrometers rely on spherical variable line space gratings with a typical efficiency on the order of 3% in the first diffractive order, this spectrometer, based on a Hettrick-Underwood design, includes a reflective zone plate as a dispersive element. An improved efficiency of 12% at the N K-edge is achieved, accompanied by a resolving power of 890. The high performance of the soft x-ray spectrometer is further demonstrated by comparing nitrogen K-edge absorption spectra from calcium nitrate in aqueous solution obtained with our high-order harmonic source to previous measurements performed at the electron storage ring facility BESSY II.