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- ItemPolarization manipulation of surface acoustic waves by metallization patterns on a piezoelectric substrate(Melville, NY : AIP Publishing, 2020) Weser, R.; Darinskii, A.N.; Schmidt, H.Surface acoustic waves (SAWs) with large normal (vertical) surface displacement at the surface are commonly utilized in microfluidic actuators in order to provide the desired momentum transfer to the fluid. We present an alternative concept using a SAW with comparatively small vertical displacement. Such a SAW passes underneath the microfluidic vessel walls with minimum losses but it needs to be converted inside the vessel into surface vibrations with large vertical displacements. The principal operability of the above idea is illustrated by experimental and numerical studies of the polarization conversion of a leaky SAW on 64° rotated Y-cut of lithium niobate owing to the partial metallization of the substrate surface. In particular, it is found that vertical displacements on the metallized surface can be up to 3.5 times higher as compared to their values on the free surface. Results of computations agree reasonably well with measurements carried out with a laser Doppler vibrometer and allow the clarification of some specific features of this polarization conversion by means of spatial frequency analysis. © 2020 Author(s).
- ItemMo-La2O3 multilayer metallization systems for high temperature surface acoustic wave sensor devices(Basel : MDPI AG, 2019) Menzel, S.B.; Seifert, M.; Priyadarshi, A.; Rane, G.K.; Park, E.; Oswald, S.; Gemming, T.Developing advanced thin film materials is the key challenge in high-temperature applications of surface acoustic wave sensor devices. One hundred nanometer thick (Mo-La2O3) multilayer systems were fabricated at room temperature on thermally oxidized (100) Si substrates (SiO2/Si) to study the effect of lanthanum oxide on the electrical resistivity of molybdenum thin films and their high-temperature stability. The multilayer systems were deposited by the magnetron sputter deposition of extremely thin (≤1 nm) La interlayers in between adjacent Mo layers. After deposition of each La layer the process was interrupted for 25 to 60 min to oxidize the La using the residual oxygen in the high vacuum of the deposition chamber. The samples were annealed at 800 °C in high vacuum for up to 120 h. In case of a 1 nm thick La interlayer in-between the Mo a continuous layer of La2O3 is formed. For thinner La layers an interlayer between adjacent Mo layers is observed consisting of a (La2O3-Mo) mixed structure of molybdenum and nm-sized lanthanum oxide particles. Measurements show that the (Mo-La2O3) multilayer systems on SiO2/Si substrates are stable at least up to 800 °C for 120 h in high vacuum conditions.
- ItemElectroless-deposited platinum antennas for wireless surface acousticwave sensors(Basel : MDPI AG, 2019) Brachmann, E.; Seifert, M.; Neumann, N.; Alshwawreh, N.; Uhlemann, M.; Menzel, S.B.; Acker, J.; Herold, S.; Hoffmann, V.; Gemming, T.In an effort to develop a cost-efficient technology for wireless high-temperature surface acoustic wave sensors, this study presents an evaluation of a combined method that integrates physical vapor deposition with electroless deposition for the fabrication of platinum-based planar antennas. The proposed manufacturing process becomes attractive for narrow, thick, and sparse metallizations for antennas in the MHz to GHz frequency range. In detail, narrow platinum-based lines of a width down to 40 μm were electroless-deposited on γ -Al2O3 substrates using different seed layers. At first, the electrolyte chemistry was optimized to obtain the highest deposition rate. Films with various thickness were prepared and the electrical resistivity, microstructure, and chemical composition in the as-prepared state and after annealing at temperatures up to 1100 °C were evaluated. Using these material parameters, the antenna was simulated with an electromagnetic full-wave simulation tool and then fabricated. The electrical parameters, including the S-parameters of the antenna, were measured. The agreement between the simulated and the realized antenna is then discussed.
- ItemHigh temperature behavior of rual thin films on piezoelectric CTGS and LGS substrates(Basel : MDPI AG, 2020) Seifert, M.This paper reports on a significant further improvement of the high temperature stability of RuAl thin films (110 nm) on the piezoelectric Ca3TaGa3Si2O14 (CTGS) and La3Ga5SiO14 (LGS) substrates. RuAl thin films with AlN or SiO2 cover layers and barriers to the substrate (each 20 nm), as well as a combination of both were prepared on thermally oxidized Si substrates, which serve as a reference for fundamental studies, and the piezoelectric CTGS, as well as LGS substrates. In somefilms, additional Al layers were added. To study their high temperature stability, the samples were annealed in air and in high vacuum up to 900 °C, and subsequently their cross-sections, phase formation, film chemistry, and electrical resistivity were analyzed. It was shown that on thermally oxidized Si substrates, all films were stable after annealing in air up to 800 °C and in high vacuum up to 900 °C. The high temperature stability of RuAl thin films on CTGS substrates was improved up to 900 °C in high vacuum by the application of a combined AlN/SiO2 barrier layer and up to 800 °C in air using a SiO2 barrier. On LGS, the films were only stable up to 600 °C in air; however, a single SiO2 barrier layer was sufficient to prevent oxidation during annealing at 900 °C in high vacuum.
- ItemBlood platelet enrichment in mass-producible surface acoustic wave (SAW) driven microfluidic chips(Cambridge : RSC, 2019) Richard, Cynthia; Fakhfouri, Armaghan; Colditz, Melanie; Striggow, Friedrich; Kronstein-Wiedemann, Romy; Tonn, Torsten; Medina-Sánchez, Mariana; Schmidt, Oliver G.; Gemming, Thomas; Winkler, AndreasThe ability to separate specific biological components from cell suspensions is indispensable for liquid biopsies, and for personalized diagnostics and therapy. This paper describes an advanced surface acoustic wave (SAW) based device designed for the enrichment of platelets (PLTs) from a dispersion of PLTs and red blood cells (RBCs) at whole blood concentrations, opening new possibilities for diverse applications involving cell manipulation with high throughput. The device is made of patterned SU-8 photoresist that is lithographically defined on the wafer scale with a new proposed methodology. The blood cells are initially focused and subsequently separated by an acoustic radiation force (ARF) applied through standing SAWs (SSAWs). By means of flow cytometric analysis, the PLT concentration factor was found to be 7.7, and it was proven that the PLTs maintain their initial state. A substantially higher cell throughput and considerably lower applied powers than comparable devices from literature were achieved. In addition, fully coupled 3D numerical simulations based on SAW wave field measurements were carried out to anticipate the coupling of the wave field into the fluid, and to obtain the resulting pressure field. A comparison to the acoustically simpler case of PDMS channel walls is given. The simulated results show an ideal match to the experimental observations and offer the first insights into the acoustic behavior of SU-8 as channel wall material. The proposed device is compatible with current (Lab-on-a-Chip) microfabrication techniques allowing for mass-scale, reproducible chip manufacturing which is crucial to push the technology from lab-based to real-world applications. © The Royal Society of Chemistry.
- ItemIn situ surface acoustic wave field probing in microfluidic structures using optical transmission interferometry(Melville, NY : American Inst. of Physics, 2021) Weser, R.; Schmidt, H.The generation of mechanical driving forces in fluids at the microscale can be efficiently realized using acoustic actuators. For this purpose, bulk or surface acoustic waves (SAWs) are typically excited by an electroacoustic transducer, and the acoustic energy is subsequently coupled to the fluid. The resultant acoustic pressure field in the fluid allows for precise manipulation of immersed objects and also for the agitation of the fluid itself. In general, the fluidic actuation capability is mainly determined by the mechanical displacement amplitude at the interface between the fluid and the acoustically active surface. In the case of SAW-based actuators, the fluid most often is directly attached to the substrate surface along which the surface waves propagate. Hence, the lateral distribution of surface displacement amplitude, i.e., the surface acoustic wave field, at the fluid–substrate interface is of particular interest in order to achieve full control of the fluidic actuation. Here, we present a reliable experimental method for the in situ determination of the SAW field on fluid loaded substrate surfaces based on laser interferometry. The optical accessibility of the fluid–substrate interface is realized via transmission through the anisotropic, piezoelectric substrate material requiring only an additional calibration procedure in order to compensate the parasitic influence of effects based on different indices of refraction as well as on complex acousto-optic effects. Finally, the proposed method is demonstrated to yield reliable results of displacement amplitude on the fluid loaded surface and thus, to provide a valuable insight into acoustofluidic coupling that was not available so far.
- ItemMultiharmonic Frequency-Chirped Transducers for Surface-Acoustic-Wave Optomechanics(College Park, Md. [u.a.] : American Physical Society, 2018) Weiß, Matthias; Hörner, Andreas L.; Zallo, Eugenio; Atkinson, Paola; Rastelli, Armando; Schmidt, Oliver G.; Wixforth, Achim; Krenner, Hubert J.Wide-passband interdigital transducers are employed to establish a stable phase lock between a train of laser pulses emitted by a mode-locked laser and a surface acoustic wave generated electrically by the transducer. The transducer design is based on a multiharmonic split-finger architecture for the excitation of a fundamental surface acoustic wave and a discrete number of its overtones. Simply by introducing a variation of the transducer's periodicity p, a frequency chirp is added. This combination results in wide frequency bands for each harmonic. The transducer's conversion efficiency from the electrical to the acoustic domain is characterized optomechanically using single quantum dots acting as nanoscale pressure sensors. The ability to generate surface acoustic waves over a wide band of frequencies enables advanced acousto-optic spectroscopy using mode-locked lasers with fixed repetition rate. Stable phase locking between the electrically generated acoustic wave and the train of laser pulses is confirmed by performing stroboscopic spectroscopy on a single quantum dot at a frequency of 320 MHz. Finally, the dynamic spectral modulation of the quantum dot is directly monitored in the time domain combining stable phase-locked optical excitation and time-correlated single-photon counting. The demonstrated scheme will be particularly useful for the experimental implementation of surface-acoustic-wave-driven quantum gates of optically addressable qubits or collective quantum states or for multicomponent Fourier synthesis of tailored nanomechanical waveforms.
- ItemSlowness curve surface acoustic wave transducers for optimized acoustic streaming(Cambridge : Royal Society of Chemistry, 2020) O'Rorke, R.; Winkler, A.; Collins, D.; Ai, Y.Surface acoustic waves can induce force gradients on the length scales of micro- and nanoparticles, allowing precise manipulation for particle capture, alignment and sorting activities. These waves typically occupy a spatial region much larger than a single particle, resulting in batch manipulation. Circular arc transducers can focus a SAW into a narrow beam on the order of the particle diameter for highly localised, single-particle manipulation by exciting wavelets which propagate to a common focal point. The anisotropic nature of SAW substrates, however, elongates and shifts the focal region. Acousto-microfluidic applications are highly dependent on the morphology of the underlying substrate displacement and, thus, become dependent on the microchannel position relative to the circular arc transducer. This requires either direct measurement or computational modelling of the SAW displacement field. We show that the directly measured elongation and shift in the focal region are recapitulated by an analytical model of beam steering, derived from a simulated slowness curve for 128° Y-cut lithium niobate. We show how the negative effects of beam steering can be negated by adjusting the curvature of arced transducers according to the slowness curve of the substrate, for which we present a simple function for convenient implementation in computational design software. Slowness-curve adjusted transducers do not require direct measurement of the SAW displacement field for microchannel placement and can capture smaller particles within the streaming vortices than can circular arc IDTs.
- ItemNew electronic device for driving surface acoustic wave actuators(Amsterdam : Elsevier, 2009) Brünig, R.; Mensel, K.; Kunze, R.; Schmidt, H.Surface acoustic wave (SAW) actuators are driven by a high frequency signal. The frequency range for an ideal SAW-generation is usually very narrow banded and may shift depending on various environmental conditions. We present a new electronic device which self-aligns to the optimal excitation frequency within a wide range. Any kind of SAW-actuator can be used. The device continuously scans a certain frequency range and characterizes the SAW-component. The ideal excitation frequency is then determined and used to drive the SAW-device. In case of changes like loading conditions or temperature variations the device automatically readjusts to the optimal frequency and prevents possible damage of the device or actuator in case of an error. © 2009.