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- ItemPolarization manipulation of surface acoustic waves by metallization patterns on a piezoelectric substrate(Melville, NY : AIP Publishing, 2020) Weser, R.; Darinskii, A.N.; Schmidt, H.Surface acoustic waves (SAWs) with large normal (vertical) surface displacement at the surface are commonly utilized in microfluidic actuators in order to provide the desired momentum transfer to the fluid. We present an alternative concept using a SAW with comparatively small vertical displacement. Such a SAW passes underneath the microfluidic vessel walls with minimum losses but it needs to be converted inside the vessel into surface vibrations with large vertical displacements. The principal operability of the above idea is illustrated by experimental and numerical studies of the polarization conversion of a leaky SAW on 64° rotated Y-cut of lithium niobate owing to the partial metallization of the substrate surface. In particular, it is found that vertical displacements on the metallized surface can be up to 3.5 times higher as compared to their values on the free surface. Results of computations agree reasonably well with measurements carried out with a laser Doppler vibrometer and allow the clarification of some specific features of this polarization conversion by means of spatial frequency analysis. © 2020 Author(s).
- ItemMo-La2O3 multilayer metallization systems for high temperature surface acoustic wave sensor devices(Basel : MDPI AG, 2019) Menzel, S.B.; Seifert, M.; Priyadarshi, A.; Rane, G.K.; Park, E.; Oswald, S.; Gemming, T.Developing advanced thin film materials is the key challenge in high-temperature applications of surface acoustic wave sensor devices. One hundred nanometer thick (Mo-La2O3) multilayer systems were fabricated at room temperature on thermally oxidized (100) Si substrates (SiO2/Si) to study the effect of lanthanum oxide on the electrical resistivity of molybdenum thin films and their high-temperature stability. The multilayer systems were deposited by the magnetron sputter deposition of extremely thin (≤1 nm) La interlayers in between adjacent Mo layers. After deposition of each La layer the process was interrupted for 25 to 60 min to oxidize the La using the residual oxygen in the high vacuum of the deposition chamber. The samples were annealed at 800 °C in high vacuum for up to 120 h. In case of a 1 nm thick La interlayer in-between the Mo a continuous layer of La2O3 is formed. For thinner La layers an interlayer between adjacent Mo layers is observed consisting of a (La2O3-Mo) mixed structure of molybdenum and nm-sized lanthanum oxide particles. Measurements show that the (Mo-La2O3) multilayer systems on SiO2/Si substrates are stable at least up to 800 °C for 120 h in high vacuum conditions.
- ItemElectroless-deposited platinum antennas for wireless surface acousticwave sensors(Basel : MDPI AG, 2019) Brachmann, E.; Seifert, M.; Neumann, N.; Alshwawreh, N.; Uhlemann, M.; Menzel, S.B.; Acker, J.; Herold, S.; Hoffmann, V.; Gemming, T.In an effort to develop a cost-efficient technology for wireless high-temperature surface acoustic wave sensors, this study presents an evaluation of a combined method that integrates physical vapor deposition with electroless deposition for the fabrication of platinum-based planar antennas. The proposed manufacturing process becomes attractive for narrow, thick, and sparse metallizations for antennas in the MHz to GHz frequency range. In detail, narrow platinum-based lines of a width down to 40 μm were electroless-deposited on γ -Al2O3 substrates using different seed layers. At first, the electrolyte chemistry was optimized to obtain the highest deposition rate. Films with various thickness were prepared and the electrical resistivity, microstructure, and chemical composition in the as-prepared state and after annealing at temperatures up to 1100 °C were evaluated. Using these material parameters, the antenna was simulated with an electromagnetic full-wave simulation tool and then fabricated. The electrical parameters, including the S-parameters of the antenna, were measured. The agreement between the simulated and the realized antenna is then discussed.
- ItemPatterning and control of the nanostructure in plasma thin films with acoustic waves: mechanical vs. electrical polarization effects(Cambridge : RSC Publ., 2021) García-Valenzuela, Aurelio; Fakhfouri, Armaghan; Oliva-Ramírez, Manuel; Rico-Gavira, Victor; Rojas, Teresa Cristina; Alvarez, Rafael; Menzel, Siegfried B.; Palmero, Alberto; Winkler, Andreas; González-Elipe, Agustín R.Nanostructuration and 2D patterning of thin films are common strategies to fabricate biomimetic surfaces and components for microfluidic, microelectronic or photonic applications. This work presents the fundamentals of a surface nanotechnology procedure for laterally tailoring the nanostructure and crystalline structure of thin films that are plasma deposited onto acoustically excited piezoelectric substrates. Using magnetron sputtering as plasma technique and TiO2 as case example, it is demonstrated that the deposited films depict a sub-millimetre 2D pattern that, characterized by large lateral differences in nanostructure, density (up to 50%), thickness, and physical properties between porous and dense zones, reproduces the wave features distribution of the generated acoustic waves (AW). Simulation modelling of the AW propagation and deposition experiments carried out without plasma and under alternative experimental conditions reveal that patterning is not driven by the collision of ad-species with mechanically excited lattice atoms of the substrate, but emerges from their interaction with plasma sheath ions locally accelerated by the AW-induced electrical polarization field developed at the substrate surface and growing film. The possibilities of the AW activation as a general approach for the tailored control of nanostructure, pattern size, and properties of thin films are demonstrated through the systematic variation of deposition conditions and the adjustment of AW operating parameters.
- ItemIn situ surface acoustic wave field probing in microfluidic structures using optical transmission interferometry(Melville, NY : American Inst. of Physics, 2021) Weser, R.; Schmidt, H.The generation of mechanical driving forces in fluids at the microscale can be efficiently realized using acoustic actuators. For this purpose, bulk or surface acoustic waves (SAWs) are typically excited by an electroacoustic transducer, and the acoustic energy is subsequently coupled to the fluid. The resultant acoustic pressure field in the fluid allows for precise manipulation of immersed objects and also for the agitation of the fluid itself. In general, the fluidic actuation capability is mainly determined by the mechanical displacement amplitude at the interface between the fluid and the acoustically active surface. In the case of SAW-based actuators, the fluid most often is directly attached to the substrate surface along which the surface waves propagate. Hence, the lateral distribution of surface displacement amplitude, i.e., the surface acoustic wave field, at the fluid–substrate interface is of particular interest in order to achieve full control of the fluidic actuation. Here, we present a reliable experimental method for the in situ determination of the SAW field on fluid loaded substrate surfaces based on laser interferometry. The optical accessibility of the fluid–substrate interface is realized via transmission through the anisotropic, piezoelectric substrate material requiring only an additional calibration procedure in order to compensate the parasitic influence of effects based on different indices of refraction as well as on complex acousto-optic effects. Finally, the proposed method is demonstrated to yield reliable results of displacement amplitude on the fluid loaded surface and thus, to provide a valuable insight into acoustofluidic coupling that was not available so far.
- ItemSlowness curve surface acoustic wave transducers for optimized acoustic streaming(Cambridge : Royal Society of Chemistry, 2020) O'Rorke, R.; Winkler, A.; Collins, D.; Ai, Y.Surface acoustic waves can induce force gradients on the length scales of micro- and nanoparticles, allowing precise manipulation for particle capture, alignment and sorting activities. These waves typically occupy a spatial region much larger than a single particle, resulting in batch manipulation. Circular arc transducers can focus a SAW into a narrow beam on the order of the particle diameter for highly localised, single-particle manipulation by exciting wavelets which propagate to a common focal point. The anisotropic nature of SAW substrates, however, elongates and shifts the focal region. Acousto-microfluidic applications are highly dependent on the morphology of the underlying substrate displacement and, thus, become dependent on the microchannel position relative to the circular arc transducer. This requires either direct measurement or computational modelling of the SAW displacement field. We show that the directly measured elongation and shift in the focal region are recapitulated by an analytical model of beam steering, derived from a simulated slowness curve for 128° Y-cut lithium niobate. We show how the negative effects of beam steering can be negated by adjusting the curvature of arced transducers according to the slowness curve of the substrate, for which we present a simple function for convenient implementation in computational design software. Slowness-curve adjusted transducers do not require direct measurement of the SAW displacement field for microchannel placement and can capture smaller particles within the streaming vortices than can circular arc IDTs.
- ItemNew electronic device for driving surface acoustic wave actuators(Amsterdam : Elsevier, 2009) Brünig, R.; Mensel, K.; Kunze, R.; Schmidt, H.Surface acoustic wave (SAW) actuators are driven by a high frequency signal. The frequency range for an ideal SAW-generation is usually very narrow banded and may shift depending on various environmental conditions. We present a new electronic device which self-aligns to the optimal excitation frequency within a wide range. Any kind of SAW-actuator can be used. The device continuously scans a certain frequency range and characterizes the SAW-component. The ideal excitation frequency is then determined and used to drive the SAW-device. In case of changes like loading conditions or temperature variations the device automatically readjusts to the optimal frequency and prevents possible damage of the device or actuator in case of an error. © 2009.