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Characteristics of austenitic stainless steel nitrided in a hybrid glow discharge plasma

2009, Oliveira, R.M., Ueda, M., Silva, L.L.G., Reuther, H., Lepienski, C.M.

A nitriding process based on two distinct nitrogen glow discharge modes, with sample temperatures ranging from 380 °Cto480°C, was employed to treat the surface of austenitic stainless steel (SS 304). The temperature is controlled exclusively by switching the operation conditions of the discharges. First mode of operation is the conventional one, named cathodic, which runs at higher pressure values (1 mbar) in comparison to the second mode, named anodic, which runs at the pressure range of 10-3 -10-2 mbar. Cathodic mode is used to quickly heat the sample holder, by the high ion flux. On the other hand, in the anodic mode, due to the lower operation pressure, higher effective ion acceleration takes place, which allows deeper ion implantation into the sample surface. This hybrid process was thoroughly explored regarding the duty cycle and conditions of operation, to achieve optimal performance of the treatments, which led to the attainment of surface hardness for samples of AISI SS 304 as high as 20 GPa and improvements including higher elastic modulus and resistance against corrosion. Detailed comparison among samples treated by this process with others treated by conventional method was done using nanoindentation, Auger Electron Spectroscopy (AES) and corrosion resistance testing.

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Unravelling the ion-energy-dependent structure evolution and its implications for the elastic properties of (V,Al)N thin films

2021, Karimi Aghda, Soheil, Music, Denis, Unutulmazsoy, Yeliz, Sua, Heng Han, Mráz, Stanislav, Hans, Marcus, Primetzhofer, Daniel, Anders, André, Schneider, Jochen M.

Ion irradiation-induced changes in the structure and mechanical properties of metastable cubic (V,Al)N deposited by reactive high power pulsed magnetron sputtering are systematically investigated by correlating experiments and theory in the ion kinetic energy (Ek) range from 4 to 154 eV. Increasing Ek results in film densification and the evolution from a columnar (111) oriented structure at Ek ≤ 24 eV to a fine-grained structure with (100) preferred orientation for Ek ≥ 104 eV. Furthermore, the compressive intrinsic stress increases by 336 % to -4.8 GPa as Ek is increased from 4 to 104 eV. Higher ion kinetic energy causes stress relaxation to -2.7 GPa at 154 eV. These ion irradiation-induced changes in the thin film stress state are in good agreement with density functional theory simulations. Furthermore, the measured elastic moduli of (V,Al)N thin films exhibit no significant dependence on Ek. The apparent independence of the elastic modulus on Ek can be rationalized by considering the concurrent and balancing effects of bombardment-induced formation of Frenkel pairs (causing a decrease in elastic modulus) and evolution of compressive intrinsic stress (causing an increase in elastic modulus). Hence, the evolution of the film stresses and mechanical properties can be understood based on the complex interplay of ion irradiation-induced defect generation and annihilation.