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High temperature reactive ion etching of iridium thin films with aluminum mask in CF4/O2/Ar plasma
Reactive ion etching (RIE) technology for iridium with CF4/O2/Ar gas mixtures and aluminum mask at high temperatures up to 350 °C was developed. The influence of various process parameters such as gas mixing ratio and substrate temperature on the etch rate was studied in order to find optimal process conditions. The surface of the samples after etching was found to be clean under SEM inspection. It was also shown that the etch rate of iridium could be enhanced at higher process temperature and, at the same time, very high etching selectivity between aluminum etching mask and iridium could be achieved.
Addition of Iridium to the Biopolymer Mediated Synthesis of YBa2Cu3O7 δ
This work represents the first study into the addition of iridium into the solgel synthesis of the high temperature superconductor YBa2Cu3O7δ (Y123). Through a biopolymermediated synthetic approach, the homogeneous nature of the precursor sol and the preferred nucleation and growth of Y123 phases allow for a high yield of superconducting nanoparticles with no suppression of the superconducting critical temperature, even at high levels (40 wt%) of iridium addition. We attribute this to iridium not substituting into the Y123 crystal lattice, instead forming an associate phase.
Ruthenacycles and Iridacycles as Transfer Hydrogenation Catalysts
In this review, we describe the synthesis and use in hydrogen transfer reactions of ruthenacycles and iridacycles. The review limits itself to metallacycles where a ligand is bound in bidentate fashion to either ruthenium or iridium via a carbon-metal sigma bond, as well as a dative bond from a heteroatom or an N-heterocyclic carbene. Pincer complexes fall outside the scope. Described are applications in (asymmetric) transfer hydrogenation of aldehydes, ketones, and imines, as well as reductive aminations. Oxidation reactions, i.e., classical Oppenauer oxidation, which is the reverse of transfer hydrogenation, as well as dehydrogenations and oxidations with oxygen, are described. Racemizations of alcohols and secondary amines are also catalyzed by ruthenacycles and iridacycles.