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Subject: Low temperatures × WGL Institute: IPHT ×

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    Process flow to integrate nanostructures on silicon grass in surface micromachined systems
    (Bristol : IOP Publ., 2016) Mehner, H.; Müller, L.; Biermann, S.; Hänschke, F.; Hoffmann, M.
    The process flow to integrate metallic nanostructures in surface micromachining processes is presented. The nanostructures are generated by evaporation of microstructured silicon grass with metal. The process flow is based on the lift-off of a thin amorphous silicon layer deposited using a CVD process. All steps feature a low temperature load beneath 120 °C and high compatibility with many materials as only well-established chemicals are used. As a result metallic nanostructures usable for optical applications can be generated as part of multilayered microsystems fabricated in surface micromachining.
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    Nanofiber-based high-Q microresonator for cryogenic applications
    (Washington, DC : Soc., 2020) Hütner, Johanna; Hoinkes, Thomas; Becker, Martin; Rothhardt, Manfred; Rauschenbeute, Arno; Skoff, Sarah M.
    We demonstrate a cryo-compatible, fully fiber-integrated, alignment-free optical microresonator. The compatibility with low temperatures expands its possible applications to the wide field of solid-state quantum optics, where a cryogenic environment is often a requirement. At a temperature of 4.6 K we obtain a quality factor of (9.9 ± 0.7) × 106. In conjunction with the small mode volume provided by the nanofiber, this cavity can be either used in the coherent dynamics or the fast cavity regime, where it can provide a Purcell factor of up to 15. Our resonator is therefore suitable for significantly enhancing the coupling between light and a large variety of different quantum emitters and due to its proven performance over a wide temperature range, also lends itself for the implementation of quantum hybrid systems. © 2020 OSA - The Optical Society. All rights reserved.