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Patterning and control of the nanostructure in plasma thin films with acoustic waves: mechanical vs. electrical polarization effects

2021, García-Valenzuela, Aurelio, Fakhfouri, Armaghan, Oliva-Ramírez, Manuel, Rico-Gavira, Victor, Rojas, Teresa Cristina, Alvarez, Rafael, Menzel, Siegfried B., Palmero, Alberto, Winkler, Andreas, González-Elipe, Agustín R.

Nanostructuration and 2D patterning of thin films are common strategies to fabricate biomimetic surfaces and components for microfluidic, microelectronic or photonic applications. This work presents the fundamentals of a surface nanotechnology procedure for laterally tailoring the nanostructure and crystalline structure of thin films that are plasma deposited onto acoustically excited piezoelectric substrates. Using magnetron sputtering as plasma technique and TiO2 as case example, it is demonstrated that the deposited films depict a sub-millimetre 2D pattern that, characterized by large lateral differences in nanostructure, density (up to 50%), thickness, and physical properties between porous and dense zones, reproduces the wave features distribution of the generated acoustic waves (AW). Simulation modelling of the AW propagation and deposition experiments carried out without plasma and under alternative experimental conditions reveal that patterning is not driven by the collision of ad-species with mechanically excited lattice atoms of the substrate, but emerges from their interaction with plasma sheath ions locally accelerated by the AW-induced electrical polarization field developed at the substrate surface and growing film. The possibilities of the AW activation as a general approach for the tailored control of nanostructure, pattern size, and properties of thin films are demonstrated through the systematic variation of deposition conditions and the adjustment of AW operating parameters.

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Behavior of a porous particle in a radiofrequency plasma under pulsed argon ion beam bombardment

2010, Wiese, R., Sushkov, V., Kersten, H., Ikkurthi, V.R., Schneider, R., Hippler, R.

The behavior of a single porous particle with a diameter of 250 μm levitating in a radiofrequency (RF) plasma under pulsed argon ion beam bombardment was investigated. The motion of the particle under the action of the ion beam was observed to be an oscillatory motion. The Fourier-analyzed motion is dominated by the excitation frequency of the pulsed ion beam and odd higher harmonics, which peak near the resonance frequency. The appearance of even harmonics is explained by a variation of the particles's charge depending on its position in the plasma sheath. The Fourier analysis also allows a discussion of neutral and ion forces. The particle's charge was derived and compared with theoretical estimates based on the orbital motion-limited (OML) model using also a numerical simulation of the RF discharge. The derived particle's charge is about 7-15 times larger than predicted by the theoretical models. This difference is attributed to the porous structure of the particle. © IOP Publishing Ltd and Deutsche Physikalische Gesellschaft.

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Observation of energetic terahertz pulses from relativistic solid density plasmas

2012, Gopal, A., May, T., Herzer, S., Reinhard, A., Minardi, S., Schubert, M., Dillner, U., Pradarutti, B., Polz, J., Gaumnitz, T., Kaluza, M.C., Jäckel, O., Riehemann, S., Ziegler, W., Gemuend, H-P., Meyer, H-G., Paulus, G.G.

We report the first experimental observation of terahertz (THz) radiation from the rear surface of a solid target while interacting with an intense laser pulse. Experimental and two-dimensional particle-in-cell simulations show that the observed THz radiation is mostly emitted at large angles to the target normal. Numerical results point out that a large part of the emission originates from a micron-scale plasma sheath at the rear surface of the target, which is also responsible for the ion acceleration. This opens a perspective for the application of THz radiation detection for on-site diagnostics of particle acceleration in laser-produced plasmas.