Laser-Induced front Side Etching: An Easy and Fast Method for Sub-μm Structuring of Dielectrics
dc.bibliographicCitation.firstPage | 542 | eng |
dc.bibliographicCitation.journalTitle | Physics Procedia | eng |
dc.bibliographicCitation.volume | 39 | eng |
dc.contributor.author | Lorenz, P. | |
dc.contributor.author | Ehrhardt, M. | |
dc.contributor.author | Zimmer, K. | |
dc.date.accessioned | 2020-11-12T07:22:12Z | |
dc.date.available | 2020-11-12T07:22:12Z | |
dc.date.issued | 2012 | |
dc.description.abstract | Laser-induced front side etching (LIFE) is a method for the nanometer-precision structuring of dielectrics, e.g. fused silica, using thin metallic as well as organic absorber layer attached to the laser-irradiated front side of the sample. As laser source an excimer laser with a wavelength of 248 nm and an pulse duration of 25 ns was used. For sub-μm patterning a phase mask illuminated by the top hat laser beam was projected by a Schwarzschild objective. The LIFE process allows the fabrication of well-defined and smooth surface structures with sub-μm lateral etching regions (Δx < 350 nm) and vertical etching depths from 1 nm to sub-mm. | eng |
dc.description.version | publishedVersion | eng |
dc.identifier.uri | https://doi.org/10.34657/4535 | |
dc.identifier.uri | https://oa.tib.eu/renate/handle/123456789/5906 | |
dc.language.iso | eng | eng |
dc.publisher | Amsterdam [u.a.] : Elsevier | eng |
dc.relation.doi | https://doi.org/10.1016/j.phpro.2012.10.071 | |
dc.relation.issn | 1875-3884 | |
dc.rights.license | CC BY-NC-ND 3.0 Unported | eng |
dc.rights.uri | https://creativecommons.org/licenses/by-nc-nd/3.0/ | eng |
dc.subject.ddc | 620 | eng |
dc.subject.gnd | Konferenzschrift | ger |
dc.subject.other | Excimer laser | eng |
dc.subject.other | Fused silica | eng |
dc.subject.other | Laser etching | eng |
dc.subject.other | LIFE | eng |
dc.subject.other | Metallic absorber layer | eng |
dc.subject.other | SAL-LIFE | eng |
dc.title | Laser-Induced front Side Etching: An Easy and Fast Method for Sub-μm Structuring of Dielectrics | eng |
dc.type | Article | eng |
dc.type | Text | eng |
tib.accessRights | openAccess | eng |
wgl.contributor | IOM | eng |
wgl.subject | Ingenieurwissenschaften | eng |
wgl.type | Zeitschriftenartikel | eng |
wgl.type | Konferenzbeitrag | eng |
Files
Original bundle
1 - 1 of 1
Loading...
- Name:
- Lorenz2012.pdf
- Size:
- 669.6 KB
- Format:
- Adobe Portable Document Format
- Description: