An investigation of target poisoning during reactive magnetron sputtering
| dc.bibliographicCitation.volume | 515 | |
| dc.contributor.author | Güttler, Dominik | |
| dc.date.accessioned | 2016-03-24T17:37:18Z | |
| dc.date.available | 2019-06-28T07:30:17Z | |
| dc.date.issued | 2009 | |
| dc.description.abstract | [no abstract available] | eng |
| dc.description.version | publishedVersion | eng |
| dc.identifier.issn | 1437-322X | |
| dc.identifier.uri | https://doi.org/10.34657/4838 | |
| dc.identifier.uri | https://oa.tib.eu/renate/handle/123456789/1301 | |
| dc.language.iso | eng | eng |
| dc.publisher | Dresden : Forschungszentrum Dresden-Rossendorf | eng |
| dc.relation.ispartofseries | Wissenschaftlich-technische Berichte / FZD, Forschungszentrum Dresden-Rossendorf, Volume 515, ISSN 1437-322X | eng |
| dc.rights.license | This document may be downloaded, read, stored and printed for your own use within the limits of § 53 UrhG but it may not be distributed via the internet or passed on to external parties. | eng |
| dc.rights.license | Dieses Dokument darf im Rahmen von § 53 UrhG zum eigenen Gebrauch kostenfrei heruntergeladen, gelesen, gespeichert und ausgedruckt, aber nicht im Internet bereitgestellt oder an Außenstehende weitergegeben werden. | ger |
| dc.subject.ddc | 620 | eng |
| dc.title | An investigation of target poisoning during reactive magnetron sputtering | eng |
| dc.type | doctoralThesis | eng |
| dc.type | Text | eng |
| dcterms.bibliographicCitation.journalTitle | Wissenschaftlich-technische Berichte / FZD, Forschungszentrum Dresden-Rossendorf | eng |
| tib.accessRights | openAccess | eng |
| wgl.contributor | FZD | eng |
| wgl.subject | Ingenieurwissenschaften | eng |
| wgl.type | Hochschulschrift | eng |
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