Improved ion beam tools for ultraprecision figure correction of curved aluminum mirror surfaces

dc.bibliographicCitation.firstPage046003
dc.bibliographicCitation.issue04
dc.bibliographicCitation.volume4
dc.contributor.authorBauer, Jens
dc.contributor.authorUlitschka, Melanie
dc.contributor.authorPietag, Fred
dc.contributor.authorArnold, Thomas
dc.date.accessioned2023-01-16T09:31:44Z
dc.date.available2023-01-16T09:31:44Z
dc.date.issued2018
dc.description.abstractAluminum mirrors offer great potential for satisfying the increasing demand in high-performance optical components for visible and ultraviolet applications. Ion beam figuring is an established finishing technology and in particular a promising technique for direct aluminum figure error correction. For the machining of strongly curved or arbitrarily shaped surfaces as well as the correction of low-to-mid spatial frequency figure errors, the usage of a high-performance ion beam source with low tool width is mandatory. For that reason, two different concepts of ion beam generation with high ion current density and narrow beam width are discussed. (1) A concave ion beam extraction grid system is used for apertureless constriction of ion beams in the low millimeter range. An oxygen ion beam with a full-width at half-maximum (FWHM) of 4.0 mm with an ion current density of 29.8  mA  /  cm2 was achieved. (2) For even smaller ion beams, a conic aperture design with a submillimeter-sized exit opening was tested. A nitrogen ion beam with an FWHM down to 0.62 mm with an ion current density of 4.6  mA  /  cm2 was obtained. In situ ion current density mapping is performed by scanning Faraday probe measurements. Special interest is set on the data evaluation for submillimeter ion beam analysis.eng
dc.description.versionpublishedVersioneng
dc.identifier.urihttps://oa.tib.eu/renate/handle/123456789/10844
dc.identifier.urihttp://dx.doi.org/10.34657/9870
dc.language.isoeng
dc.publisher[Bellingham, Wash.] : SPIE
dc.relation.doihttps://doi.org/10.1117/1.jatis.4.4.046003
dc.relation.essn2329-4221
dc.relation.ispartofseriesJournal of Astronomical Telescopes, Instruments, and Systems 4 (2018), Nr. 04eng
dc.relation.issn2329-4124
dc.rights.licenseCC BY 4.0 Unported
dc.rights.urihttps://creativecommons.org/licenses/by/4.0/
dc.subjectFaraday probe analysiseng
dc.subjection beam figuringeng
dc.subjection optical componentseng
dc.subjectsubmillimeter ion beam toolseng
dc.subject.ddc520
dc.subject.ddc530
dc.titleImproved ion beam tools for ultraprecision figure correction of curved aluminum mirror surfaceseng
dc.typearticle
dc.typeText
dcterms.bibliographicCitation.journalTitleJournal of Astronomical Telescopes, Instruments, and Systems
tib.accessRightsopenAccess
wgl.contributorIOM
wgl.subjectPhysikger
wgl.typeZeitschriftenartikelger
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