Pattern formation on Ge by low energy ion beam erosion

dc.bibliographicCitation.firstPage103029eng
dc.bibliographicCitation.lastPage7088eng
dc.bibliographicCitation.volume15eng
dc.contributor.authorTeichmann, M.
dc.contributor.authorLorbeer, J.
dc.contributor.authorZiberi, B.
dc.contributor.authorFrost, F.
dc.contributor.authorRauschenbach, B.
dc.date.accessioned2020-09-29T09:09:45Z
dc.date.available2020-09-29T09:09:45Z
dc.date.issued2013
dc.description.abstractModification of nanoscale surface topography is inherent to low-energy ion beam erosion processes and is one of the most important fields of nanotechnology. In this report a comprehensive study of surface smoothing and self-organized pattern formation on Ge(100) by using different noble gases ion beam erosion is presented. The investigations focus on low ion energies ( 2000 eV) and include the entire range of ion incidence angles. It is found that for ions (Ne, Ar) with masses lower than the mass of the Ge target atoms, no pattern formation occurs and surface smoothing is observed for all angles of ion incidence. In contrast, for erosion with higher mass ions (Kr, Xe), ripple formation starts at incidence angles of about 65° depending on ion energy. At smaller incident angles surface smoothing occurs again. Investigations of the surface dynamics for specific ion incidence angles by changing the ion fluence over two orders of magnitude gives a clear evidence for coarsening and faceting of the surface pattern. Both observations indicate that gradient-dependent sputtering and reflection of primary ions play crucial role in the pattern evolution, just at the lowest accessible fluences. The results are discussed in relation to recently proposed redistributive or stress-induced models for pattern formation. In addition, it is argued that a large angular variation of the sputter yield and reflected primary ions can significantly contribute to pattern formation and evolution as nonlinear and non-local processes as supported by simulation of sputtering and ion reflection.eng
dc.description.versionpublishedVersioneng
dc.identifier.urihttps://doi.org/10.34657/4429
dc.identifier.urihttps://oa.tib.eu/renate/handle/123456789/5800
dc.language.isoengeng
dc.publisherBristol : IOPeng
dc.relation.doihttps://doi.org/10.1088/1367-2630/15/10/103029
dc.relation.ispartofseriesNew Journal of Physics 15 (2013)eng
dc.relation.issn1367-2630
dc.rights.licenseCC BY 3.0 Unportedeng
dc.rights.urihttps://creativecommons.org/licenses/by/3.0/eng
dc.subjectAngular variationeng
dc.subjectIon incidence angleeng
dc.subjectLow-energy ion beam erosioneng
dc.subjectOrders of magnitudeeng
dc.subjectPattern evolutioneng
dc.subjectPattern formationeng
dc.subjectSelf-organized patternseng
dc.subjectSurface smoothingeng
dc.subjectGermaniumeng
dc.subjectInert gaseseng
dc.subjectNanotechnologyeng
dc.subjectSputteringeng
dc.subjectIonseng
dc.subject.ddc530eng
dc.titlePattern formation on Ge by low energy ion beam erosioneng
dc.typearticleeng
dc.typeTexteng
dcterms.bibliographicCitation.journalTitleNew Journal of Physicseng
tib.accessRightsopenAccesseng
wgl.contributorIOMeng
wgl.subjectPhysikeng
wgl.typeZeitschriftenartikeleng
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