Rolled-up tubes and cantilevers by releasing SrRuO 3-Pr 0.7Ca 0.3MnO 3 nanomembranes

Three-dimensional micro-objects are fabricated by the controlled release of inherently strained SrRuO 3/Pr 0.7Ca 0.3MnO 3/SrRuO 3 nanometer-sized trilayers from SrTiO 3 (001) substrates. Freestanding cantilevers and rolled-up microtubes with a diameter of 6 to 8 μm are demonstrated. The etching behavior of the SrRuO3 film is investigated, and a selectivity of 1:9,100 with respect to the SrTiO3 substrate is found. The initial and final strain states of the rolled-up oxide layers are studied by X-ray diffraction on an ensemble of tubes. Relaxation of the sandwiched Pr0.7Ca0.3MnO3 layer towards its bulk lattice parameter is observed as the major driving force for the roll-up of the trilayers. Finally, μ-diffraction experiments reveal that a single object can represent the ensemble proving a good homogeneity of the rolled-up tubes.

Keywords

Ferroic oxides, Freestanding membranes, Rolled-up nanotubes and microtubes, Strain engineering, Controlled release, Driving forces, Etching behavior, Free standing membranes, Micro-objects, Micro-tubes, Nanomembranes, Oxide layer, Pr0.7Ca0.3MnO3, Rolled-up nanotubes and microtubes, Single object, SrTiO, SrTiO3 substrates, Strain engineering, Strain state, Trilayers, Manganese oxide, Nanotubes, Strontium titanates, Substrates, X ray diffraction, Nanocantilevers

URI

https://doi.org/10.34657/4385
https://oa.tib.eu/renate/handle/123456789/5756

Citation

Deneke, C., Wild, E., Boldyreva, K., Baunack, S., Cendula, P., Mönch, I., et al. (2011). Rolled-up tubes and cantilevers by releasing SrRuO 3-Pr 0.7Ca 0.3MnO 3 nanomembranes. 6. https://doi.org//10.1186/1556-276X-6-621

Collections

Ingenieurwissenschaften

License

CC BY 2.0 Unported

https://creativecommons.org/licenses/by/2.0/

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