In situ measurements with CPC micro-actuators using SEM

Abstract

Comparative measurements of carbon-polymer composite micro-actuators based on room temperature ionic liquid electrolyte were carried out in situ (1) in vacuum using a state-of-the-art scanning electron microscope, (2) in an oxygen-free atmosphere under ambient pressure, and (3) under ambient environment. The fabricated micro-actuators sustained their actuation performance in all three environments, revealing important implications regarding their humidity-dependence. SEM observations demonstrate high stroke actuation of a device with submillimeter length, which is the typical size range of actuators desirable for medical or lab-on-chip applications.