Spectroscopic characterization of a radio-frequency argon plasma jet discharge in ambient air

Abstract

This study includes a detailed experimental investigation of the spatial and temporal spectroscopic emission of an argon plasma jet discharge. The study is carried out in ambient air and quenching by inflowing air species is considered. The optical emission spectroscopy of neutral atomic spectral lines and molecular bands, over a range of plasma process parameters, is investigated. Wavelength-resolved argon optical emission profiles are used to monitor the electron energy distribution function and the density of argon metastable atoms. The experimental data indicates that the argon flow rate, in a confined open-air plasma discharge, limits the impact of molecular oxygen in the creation of oxygen radicals. The absolute calibrated emission spectra facilitate the possibility of standardization of the so-called plasma dose.